US 12,248,166 B2
Metasurfaces for redirecting light and methods for fabricating
Dianmin Lin, Los Altos, CA (US); Mauro Melli, San Leandro, CA (US); Pierre St. Hilaire, Belmont, CA (US); Christophe Peroz, Tokyo (JP); and Evgeni Poliakov, Oakland, CA (US)
Assigned to Magic Leap, Inc., Plantation, FL (US)
Filed by Magic Leap, Inc., Plantation, FL (US)
Filed on Sep. 11, 2023, as Appl. No. 18/464,732.
Application 18/464,732 is a continuation of application No. 17/583,079, filed on Jan. 24, 2022, granted, now 11,789,198.
Application 17/583,079 is a continuation of application No. 15/342,033, filed on Nov. 2, 2016, granted, now 11,231,544, issued on Jan. 25, 2022.
Claims priority of provisional application 62/252,929, filed on Nov. 9, 2015.
Claims priority of provisional application 62/252,315, filed on Nov. 6, 2015.
Prior Publication US 2023/0417980 A1, Dec. 28, 2023
Int. Cl. G02B 6/00 (2006.01); F21V 8/00 (2006.01); G02B 6/122 (2006.01); G02B 6/293 (2006.01); G02B 27/01 (2006.01); G02B 5/18 (2006.01)
CPC G02B 6/0076 (2013.01) [G02B 6/00 (2013.01); G02B 6/0013 (2013.01); G02B 6/0026 (2013.01); G02B 6/0031 (2013.01); G02B 6/005 (2013.01); G02B 6/0065 (2013.01); G02B 6/29316 (2013.01); G02B 27/0172 (2013.01); G02B 5/1823 (2013.01); G02B 6/1226 (2013.01); G02B 2027/0134 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for forming a metasurface on an optical waveguide, the method comprising:
providing a layer of a first optically transmissive material on a surface of an optically transmissive substrate of the optical waveguide;
patterning the first optically transmissive material with a pattern that comprises a plurality of spaced-apart protrusions and spaces between the protrusions, wherein the plurality of spaced-apart protrusions extend outward from the surface and have a pitch;
depositing a second optically transmissive material into at least some of the gaps between the protrusions to form the metasurface that is a multilevel metasurface on the surface, wherein the second optically transmissive material at least partly fills the spaces between the protrusions.