US 12,248,161 B2
Optical filter and method for manufacturing same
Keiichi Sahara, Otsu (JP); Masaaki Imura, Otsu (JP); and Takako Tojo, Otsu (JP)
Assigned to NIPPON ELECTRIC GLASS CO., LTD., Shiga (JP)
Appl. No. 17/775,412
Filed by NIPPON ELECTRIC GLASS CO., LTD., Otsu (JP)
PCT Filed Dec. 3, 2020, PCT No. PCT/JP2020/045056
§ 371(c)(1), (2) Date May 9, 2022,
PCT Pub. No. WO2021/117598, PCT Pub. Date Jun. 17, 2021.
Claims priority of application No. 2019-223922 (JP), filed on Dec. 11, 2019; and application No. 2019-223923 (JP), filed on Dec. 11, 2019.
Prior Publication US 2022/0381962 A1, Dec. 1, 2022
Int. Cl. G02B 5/28 (2006.01); C03C 17/22 (2006.01); C03C 17/34 (2006.01); C23C 14/00 (2006.01); C23C 14/10 (2006.01); C23C 14/18 (2006.01); C23C 14/34 (2006.01); C23C 14/58 (2006.01); G02B 1/113 (2015.01)
CPC G02B 5/285 (2013.01) [C03C 17/22 (2013.01); C03C 17/3482 (2013.01); C23C 14/0036 (2013.01); C23C 14/10 (2013.01); C23C 14/185 (2013.01); C23C 14/34 (2013.01); C23C 14/5846 (2013.01); G02B 1/113 (2013.01); C03C 2217/734 (2013.01); C03C 2218/154 (2013.01); C03C 2218/155 (2013.01); G02B 5/281 (2013.01)] 6 Claims
OG exemplary drawing
 
1. An optical filter comprising a hydrogenated silicon-containing film, wherein in a Raman spectrum of the hydrogenated silicon-containing film measured by Raman spectroscopy a ratio (SiH/SiH2) obtained from a ratio between an area of a peak derived from SiH and an area of a peak derived from SiH2 is 0.7 or more.