US 12,248,116 B2
Charged-particle measurement apparatus and control method of charged-particle measurement apparatus
Naoto Kume, Yokohama (JP); Haruo Miyadera, Kawasaki (JP); Takuro Fujimaki, Ota (JP); Tsukasa Sugita, Yokohama (JP); Yuki Nakai, Yokohama (JP); Masataka Suga, Kawasaki (JP); and Kohei Nobe, Ota (JP)
Assigned to KABUSHIKI KAISHA TOSHIBA, Tokyo (JP); and TOSHIBA ENERGY SYSTEMS & SOLUTIONS CORPORATION, Kawasaki (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP); and TOSHIBA ENERGY SYSTEMS & SOLUTIONS CORPORATION, Kawasaki (JP)
Filed on Jun. 17, 2022, as Appl. No. 17/843,043.
Claims priority of application No. 2021-119390 (JP), filed on Jul. 20, 2021.
Prior Publication US 2023/0026295 A1, Jan. 26, 2023
Int. Cl. G01V 5/22 (2024.01); G01T 1/29 (2006.01)
CPC G01V 5/22 (2024.01) [G01T 1/2935 (2013.01); G01T 1/2985 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A charged-particle measurement apparatus comprising:
a plurality of gas detectors in each of which gas for detecting passage of a charged particle is enclosed;
a trajectory calculator configured to calculate a trajectory of the charged particle based on detection signals outputted from the plurality of gas detectors and each of parameters associated with the plurality of gas detectors;
a measurer configured to measure an object based on the trajectory of the charged particle, the object being a measurement target;
a signal intensity acquirer configured to acquire signal intensity of the detection signals;
an operating state monitor configured to evaluate each of operating states of the plurality of gas detectors based on the signal intensity corresponding to each of the plurality of gas detectors; and
a parameter updating processor configured to update at least one parameter when at least one of the operating states of the plurality of gas detectors associated with this parameter changes, wherein
the signal intensity acquirer includes a time difference distribution acquirer configured to acquire time difference distribution of at least one detection signal; and
the operating state monitor is configured to evaluate at least one operating state based on the time difference distribution corresponding to at least one gas detector.