US 12,248,109 B2
Method of manufacturing radiographic imaging apparatus
Haruyasu Nakatsugawa, Kanagawa (JP); Shinichi Ushikura, Kanagawa (JP); and Munetaka Kato, Kanagawa (JP)
Assigned to FUJIFILM CORPORATION, Tokyo (JP)
Filed by FUJIFILM CORPORATION, Tokyo (JP)
Filed on Jun. 9, 2022, as Appl. No. 17/806,265.
Application 17/806,265 is a continuation of application No. PCT/JP2020/048289, filed on Dec. 23, 2020.
Claims priority of application No. 2019-239569 (JP), filed on Dec. 27, 2019.
Prior Publication US 2022/0299662 A1, Sep. 22, 2022
Int. Cl. G01T 1/20 (2006.01); H01L 27/146 (2006.01)
CPC G01T 1/2018 (2013.01) [H01L 27/14663 (2013.01); H01L 27/14683 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A method of manufacturing a radiographic imaging apparatus, the method comprising:
providing a flexible base material on a support body and forming a substrate in which a plurality of pixels for accumulating electric charges generated depending on light converted from radiation is provided in a pixel region of the base material;
providing a conversion layer that converts the radiation into light on a surface of the base material provided with the pixels;
connecting one end of a flexible cable connected to a circuit module to the substrate;
providing a fixing plate on a surface of the conversion layer opposite to a surface on a substrate side;
fixing the flexible cable to the fixing plate; and
after the flexible cable is fixed to the fixing plate, peeling the substrate provided with the conversion layer and the fixing plate from the support body, with the flexible cable fixed to the fixing plate.