US 12,248,037 B2
Magnetic sensor
Daizo Endo, Ichihara (JP); Tatsunori Shino, Ichihara (JP); Akira Sakawaki, Ichihara (JP); Sho Tonegawa, Ichihara (JP); and Yasumasa Watanabe, Ichihara (JP)
Assigned to Resonac Corporation, Tokyo (JP)
Appl. No. 17/596,213
Filed by SHOWA DENKO K.K., Tokyo (JP)
PCT Filed Nov. 17, 2020, PCT No. PCT/JP2020/042698
§ 371(c)(1), (2) Date Dec. 6, 2021,
PCT Pub. No. WO2021/131401, PCT Pub. Date Jul. 1, 2021.
Claims priority of application No. 2019-237379 (JP), filed on Dec. 26, 2019.
Prior Publication US 2022/0381853 A1, Dec. 1, 2022
Int. Cl. G01R 33/06 (2006.01)
CPC G01R 33/063 (2013.01) 6 Claims
OG exemplary drawing
 
1. A magnetic sensor comprising:
a non-magnetic substrate; and
a sensitive element having a longitudinal direction and a short direction, provided with uniaxial magnetic anisotropy in a direction crossing the longitudinal direction, and sensing a magnetic field by a magnetic impedance effect, wherein
the sensitive element includes a plurality of soft magnetic material layers and a plurality of non-magnetic material layers configured with a non-magnetic material and laminated between the plural soft magnetic material layers, the plurality of soft magnetic material layers and the plurality of non-magnetic material layers are alternately laminated in a thickness direction of the plurality of soft magnetic material layers and the plurality of non-magnetic material layers, and the soft magnetic material layers facing each other with each of the non-magnetic material layers interposed therebetween are antiferromagnetically coupled, and
an impedance is measured by passing a current in a surface direction of the soft magnetic material layers.