US 12,248,004 B2
Membrane probe card and its probe head
Liangyu Zhao, Suzhou (CN); Haichao Yu, Suzhou (CN); and Ailin Wang, Suzhou (CN)
Assigned to MAXONE SEMICONDUCTOR CO., LTD., Suzhou (CN)
Filed by Maxone Semiconductor Co., Ltd, Jiangsu (CN)
Filed on Apr. 22, 2022, as Appl. No. 17/726,706.
Claims priority of application No. 202111433598.X (CN), filed on Nov. 29, 2021.
Prior Publication US 2023/0168279 A1, Jun. 1, 2023
Int. Cl. G01R 1/073 (2006.01)
CPC G01R 1/07342 (2013.01) 16 Claims
OG exemplary drawing
 
1. A membrane probe card comprising:
a PCB board,
a connector, and
a membrane probe head, the membrane probe head comprising a support including a convex structure projecting in a projecting direction from a base end to an end surface, the end surface being an acting surface, a membrane covering the acting surface of the support, one or more probes arranged on the membrane so as to project from the membrane in the projecting direction, and an interconnecting wire buried inside the membrane;
wherein:
a concave supporting structure is arranged between the acting surface of the support and the membrane;
the concave supporting structure comprises:
a concave structure comprising one or more concaves fixed relative to the acting surface, the one or more concaves extending concavely inward in a direction towards the base end of the support and being arranged at positions respectively corresponding to positions of the one or more probes along the acting surface such that each concave of the one or more concaves is eccentric with respect to a projection of a corresponding probe on the acting surface, and
a supporting elastic layer embedded between the concave structure and the membrane;
the supporting elastic layer is provided with one or more convex inserts relative to the one or more concaves in the concave structure, and the one or more convex inserts of the supporting elastic layer project convexly towards the base end of the support and are respectively embedded in a corresponding concave of the one or more concaves; and
a thickness of the supporting elastic layer varies along an extension direction of the supporting elastic layer such that a first thickness of the supporting elastic layer on one side of an axis of a probe of the one or more probes in the extension direction is less than a second thickness of the supporting elastic layer on an opposite side of the axis of the probe in the extension direction, the axis extending in the projecting direction and being transverse to the extension direction, and the first thickness and the second thickness being respective dimensions of the supporting elastic layer along a direction orthogonal to the extension direction.