US 12,247,999 B2
Surface analysis method, surface analysis system, and surface analysis program
Yuki Arai, Tokyo (JP)
Assigned to RESONAC CORPORATION, Tokyo (JP)
Appl. No. 18/012,546
Filed by Showa Denko Materials Co., Ltd., Tokyo (JP)
PCT Filed Jul. 31, 2020, PCT No. PCT/JP2020/029511
§ 371(c)(1), (2) Date Dec. 22, 2022,
PCT Pub. No. WO2022/024370, PCT Pub. Date Feb. 3, 2022.
Prior Publication US 2023/0273237 A1, Aug. 31, 2023
Int. Cl. G01Q 60/24 (2010.01)
CPC G01Q 60/24 (2013.01) 11 Claims
OG exemplary drawing
 
1. A surface analysis method comprising:
acquiring a force curve corresponding to measurement of a sample surface by a scanning probe microscope, the scanning probe microscope performing the measurement at each of an observation point group on the sample surface by, while reciprocating a probe with respect to a stage along a X-direction along a horizontal surface, moving the probe in one direction with respect to the stage along a Y-direction which is along the horizontal surface and orthogonal to the X-direction;
calculating a physical quantity of an organic material forming the sample surface based on the force curve, for each of the observation point group; and
outputting analysis data indicating the physical quantity of each of the observation point group, wherein
the acquiring the force curve comprises acquiring, for each of at least one Y-column extending along the X-direction, the force curve at each of a plurality of observation points on the Y-column, and
the calculating the physical quantity comprises:
generating, for each of the at least one Y-column, a force curve matrix indicating the force curve at each of the plurality of observation points on the Y-column; and
calculating, for each of the at least one Y-column, the physical quantity at each of the plurality of observation points using the force curve matrix.