US 12,247,998 B2
Scattering-type scanning near-field optical microscopy with Akiyama piezo-probes
Michael Dapolito, Port Jefferson, NY (US); Mengkun Liu, Stony Brook, NY (US); Xinzhong Chen, Maspeth, NY (US); and Adrian Gozar, West Haven, CT (US)
Assigned to The Research Foundation for The State University of New York, Albany, NY (US); and Yale University, New Haven, CT (US)
Appl. No. 18/694,765
Filed by THE RESEARCH FOUNDATION FOR THE STATE UNIVERSITY OF NEW YORK, Albany, NY (US); and YALE UNIVERSITY, New Haven, CT (US)
PCT Filed Sep. 22, 2022, PCT No. PCT/US2022/044311
§ 371(c)(1), (2) Date May 14, 2024,
PCT Pub. No. WO2023/049225, PCT Pub. Date Mar. 30, 2023.
Claims priority of provisional application 63/246,980, filed on Sep. 22, 2021.
Prior Publication US 2024/0272196 A1, Aug. 15, 2024
Int. Cl. G01Q 10/04 (2010.01); G01Q 20/04 (2010.01); G01Q 30/10 (2010.01); G01Q 60/06 (2010.01); G01Q 60/22 (2010.01)
CPC G01Q 10/045 (2013.01) [G01Q 20/04 (2013.01); G01Q 30/10 (2013.01); G01Q 60/06 (2013.01); G01Q 60/22 (2013.01)] 28 Claims
OG exemplary drawing
 
1. An apparatus for detecting optical properties of a sample comprising:
a scattering-type scanning field near-field optical microscope having a self-sensing piezo-electric based probe including a cantilevered probe tip for probing the sample, the self-sensing piezo-electric based probe being driven using an electrical signal;
a system for applying coherent light upon a sample being probed by the driven self-sensing piezo-electric based probe, the self-sensing piezo-electric probe generating a modified electrical signal responsive to a topography of said sample being probed; and
a detector for imaging an optical property of the sample based on a coherent light-sample interaction in a near-field regime of the cantilevered probe tip interacting with said sample,
wherein the applied electrical signal defines a cantilever tapping frequency and amplitude for tuning the self-sensing piezo-electric based probe.