US 12,247,939 B2
Ingot growing apparatus and monitoring method thereof
Min Jae Yoon, Gumi-si (KR)
Assigned to SK SILTRON CO., LTD., Gumi-si (KR)
Filed by SK SILTRON CO., LTD., Gumi-si (KR)
Filed on Feb. 22, 2023, as Appl. No. 18/172,951.
Claims priority of application No. 10-2022-0032347 (KR), filed on Mar. 15, 2022.
Prior Publication US 2023/0296543 A1, Sep. 21, 2023
Int. Cl. G06T 7/00 (2017.01); G01N 25/72 (2006.01); G06T 7/62 (2017.01)
CPC G01N 25/72 (2013.01) [G06T 7/0006 (2013.01); G06T 7/62 (2017.01); G06T 2207/30148 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An apparatus for growing an ingot from a melt accommodated in a crucible of a chamber, comprising:
a first sensor installed on one side of the chamber for detecting a detection signal in real time from a side portion of the ingot; and
a controller,
wherein the side portion of the ingot rotates via a detection area focused by the first sensor, and
wherein the controller is configured:
to obtain a detection signal at each of a plurality of sampling points based on detection signals detected in real time,
to obtain a value of a central point of the ingot based on the detection signal at each of the plurality of sampling points, and
to determine whether or not the ingot is defective based on the value of the central point of the ingot.