US 12,247,928 B2
Inspection device and inspection method for sheet layer
Masataka Koyama, Kobe (JP); Tomohiro Kinoshita, Kobe (JP); Hiroharu Suzuki, Kobe (JP); Motohiro Nakagami, Kobe (JP); Yuki Hanawa, Kobe (JP); Shogo Kojima, Kobe (JP); and Yusaku Ishida, Kobe (JP)
Assigned to KAWASAKI JUKOGYO KABUSHIKI KAISHA, Kobe (JP)
Appl. No. 17/789,244
Filed by Kawasaki Jukogyo Kabushiki Kaisha, Kobe (JP)
PCT Filed Dec. 25, 2020, PCT No. PCT/JP2020/048919
§ 371(c)(1), (2) Date Jun. 27, 2022,
PCT Pub. No. WO2021/132629, PCT Pub. Date Jul. 1, 2021.
Claims priority of application No. 2019-237749 (JP), filed on Dec. 27, 2019.
Prior Publication US 2023/0035817 A1, Feb. 2, 2023
Int. Cl. G01N 21/95 (2006.01); G01B 11/25 (2006.01)
CPC G01N 21/9515 (2013.01) [G01B 11/2518 (2013.01); G01N 2021/9518 (2013.01)] 9 Claims
OG exemplary drawing
 
1. An inspection device for a sheet layer that inspects a sheet layer laminated on a base substrate, the inspection device comprising:
a scanner including a laser sensor that measures a two-dimensional shape of an inspection object using laser slit light, and a mover that moves the laser sensor in a predetermined direction;
first recognition circuitry that obtains three-dimensional shape data of an inspection object by associating a plurality of two-dimensional shape data obtained by the laser sensor with position data of the laser sensor at a time of measuring the two-dimensional shape;
second recognition circuitry that derives a three-dimensional shape of a sheet layer by obtaining a difference between first three-dimensional shape data indicating a three-dimensional shape of a first inspection object before the sheet layer is laminated on the base substrate and second three-dimensional shape data indicating a three-dimensional shape of a second inspection object after the sheet layer is laminated on the base substrate; and
a support that supports the base substrate such that the base substrate has a changeable posture,
wherein the base substrate includes a first surface and a second surface having a plane direction different from a plane direction of the first surface, the sheet layer being laminated across the first surface and the second surface, and
the support supports the base substrate such that the posture of the base substrate is changeable between a posture in which at least the first surface is irradiated with the laser slit light and a posture in which the second surface is irradiated with the laser slit light.