US 12,247,923 B2
Graphene hybrids for biological and chemical sensing
Joshua A. Robinson, State College, PA (US); Natalie Briggs, Benton City, WA (US); Kenneth Knappenberger, State College, PA (US); and Tian Zhao, State College, PA (US)
Assigned to THE PENN STATE RESEARCH FOUNDATION, University Park, PA (US)
Appl. No. 17/594,595
Filed by The Penn State Research Foundation, University Park, PA (US)
PCT Filed Apr. 21, 2020, PCT No. PCT/US2020/029127
§ 371(c)(1), (2) Date Oct. 22, 2021,
PCT Pub. No. WO2020/219454, PCT Pub. Date Oct. 29, 2020.
Claims priority of provisional application 62/838,526, filed on Apr. 25, 2019.
Prior Publication US 2022/0178831 A1, Jun. 9, 2022
Int. Cl. C30B 29/68 (2006.01); C30B 23/02 (2006.01); C30B 25/18 (2006.01); C30B 29/06 (2006.01); C30B 29/46 (2006.01); G01N 21/65 (2006.01); H01L 21/02 (2006.01); H01L 29/16 (2006.01)
CPC G01N 21/658 (2013.01) [C30B 23/025 (2013.01); C30B 25/183 (2013.01); C30B 29/06 (2013.01); C30B 29/46 (2013.01); C30B 29/68 (2013.01); H01L 21/02378 (2013.01); H01L 21/02499 (2013.01); H01L 21/02527 (2013.01); H01L 21/02532 (2013.01); H01L 21/02631 (2013.01); H01L 21/02694 (2013.01); H01L 29/1606 (2013.01); G01N 2201/06113 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A plasmonic or electronically resonant material, comprising:
a substrate; and
a plurality of epitaxial growth layers formed on the substrate, the plurality of epitaxial growth layers comprising:
a buffer layer adjacent the substrate, the buffer layer being an electrically inactive layer, the buffer layer being partially bonded via covalent bonding to the substrate; and
a growth layer adjacent the buffer layer, the growth layer including a plurality of defects, the growth layer being an electrically active layer; and
an interface layer formed between the plurality of epitaxial growth layers and the substrate, the interface layer comprising graphene passivated with intercalant, wherein the intercalate physically and electronically decouples the buffer layer from the substrate.