| CPC G01D 5/35316 (2013.01) [G01B 11/14 (2013.01)] | 2 Claims |
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1. A micro-displacement measurement system having a picometer scale resolution, comprising a probe module, a demodulation optical path module, a static lock-in amplification module, an upper computer module, and a micro-displacement drive module, wherein
the probe module comprises: a measurement fiber Bragg grating (FBG) sensor, a matching FBG sensor, a precision stainless steel needle tube, and an external support,
the precision stainless steel needle tube is clamped on the external support, the measurement FBG sensor and the matching FBG sensor are packaged side by side in the precision stainless steel needle tube, a distance from a fiber end surface of the measurement FBG sensor to a bottom portion of the precision stainless steel needle tube is less than a distance from a fiber end surface of the matching FBG sensor to the bottom portion of the precision stainless steel needle tube, so that a dual FBG self-compensating demodulation structure is formed, the measurement FBG sensor and the matching FBG sensor are both single-mode FBGs and have Bragg center wavelengths of 1549.949 nm and 1549.963 nm respectively, 3 dB bandwidths of 0.134 nm and 0.132 nm respectively, and grating lengths of 15 mm, a difference between the Bragg center wavelengths of the two FBGs is 0.014 nm,
the demodulation optical path module comprises: an amplified spontaneous emission (ASE) broadband light source, a first circulator, a second circulator, and an InGaAs photodetector,
the probe module is put into a water bath box, after a temperature of a water bath rises from 15° C. to 20° C., average output values of the InGaAs photodetector respectively are −0.433V and −0.428V, measurement standard deviations respectively are 2.293 mV and 2.707 mV, and an output voltage drift by 5.345 mV as the temperature rises,
an input end of the first circulator is connected to the ASE broadband light source, an output end of the first circulator is connected to the measurement FBG sensor, an input end of the second circulator is connected to a reflection end of the first circulator, an output end of the second circulator is connected to the matching FBG sensor, a reflection end of the second circulator is connected to an input end of the InGaAs photodetector, the first circulator and the second circulator are both 1×2 circulators and have operating wavelengths of 1550 nm, insertion loss of 0.80 dB and 0.63 dB respectively, and return loss≥55 dB,
an output end of the InGaAs photodetector is connected to the static lock-in amplification module,
the upper computer module comprises: a data acquisition card and a computer,
an output signal of the static lock-in amplification module is transmitted to the computer through the data acquisition card,
the micro-displacement drive module comprises a piezoelectric ceramic nano-positioner, a piezoelectric ceramic driver, and a three-dimensional precision micro-motion platform, the piezoelectric ceramic nano-positioner has a closed-loop stroke of 2 μm, a repeatability of 0.7 nm, and a resolution of 0.03 nm,
an input end of the piezoelectric ceramic driver is connected to the computer, an output end of the piezoelectric ceramic driver is connected to the piezoelectric ceramic nano-positioner, the piezoelectric ceramic nano-positioner is fixed onto the three-dimensional precision micro-motion platform, and
laser light emitted by the ASE broadband light source is transmitted into the measurement FBG sensor through the first circulator, first reflected light after the measurement FBG sensor reflects the laser light reaches the input end of the second circulator and is transmitted into the matching FBG sensor by the second circulator, second reflected light after the matching FBG sensor reflects the first reflected light enters the InGaAs photodetector, and an optical power voltage signal is outputted by the InGaAs photodetector, transmitted to the static lock-in amplification module for processing, and then transmitted into the computer through the data acquisition card, wherein the optical power voltage signal is proportional to a spectral overlapping area of the measurement FBG sensor and the matching FBG sensor.
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