US 12,247,768 B2
Electrocaloric effect element, heat transfer device, semiconductor manufacturing device, and electrocaloric effect element control method
Koji Akiyama, Yamanashi (JP); Hiroyuki Nagai, Yamanashi (JP); Mitsuaki Iwashita, Yamanashi (JP); and Hirokazu Ueda, Yamanashi (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Appl. No. 17/907,699
Filed by Tokyo Electron Limited, Tokyo (JP)
PCT Filed Aug. 12, 2021, PCT No. PCT/JP2021/029761
§ 371(c)(1), (2) Date Sep. 29, 2022,
PCT Pub. No. WO2022/044835, PCT Pub. Date Mar. 3, 2022.
Claims priority of application No. 2020-142661 (JP), filed on Aug. 26, 2020.
Prior Publication US 2023/0135523 A1, May 4, 2023
Int. Cl. F25B 21/02 (2006.01); F25B 49/00 (2006.01)
CPC F25B 21/02 (2013.01) [F25B 49/00 (2013.01)] 17 Claims
OG exemplary drawing
 
1. An electrocaloric effect element comprising:
a container having a first wall and a second wall, the second wall facing the first wall;
ionic liquid accommodated in the container;
a first electrode provided at an outer surface of the first wall; and
a movable electrode provided in the ionic liquid such that the movable electrode is movable in the ionic liquid.