US 12,247,292 B2
Apparatus for electroless metallization of a target surface of at least one workpiece, and method and diffuser plate for this purpose
Hubert Parzefall, Mintraching (DE)
Assigned to AP & S INTERNATIONAL GMBH, Donaueschingen (DE)
Appl. No. 17/783,850
Filed by AP&S INTERNATIONAL GMBH, Donaueschingen (DE)
PCT Filed Nov. 18, 2020, PCT No. PCT/EP2020/082594
§ 371(c)(1), (2) Date Jun. 9, 2022,
PCT Pub. No. WO2021/115746, PCT Pub. Date Jun. 17, 2021.
Claims priority of application No. 102019134116.7 (DE), filed on Dec. 12, 2019.
Prior Publication US 2023/0047104 A1, Feb. 16, 2023
Int. Cl. C23C 18/16 (2006.01); B05C 3/00 (2006.01); B05C 3/132 (2006.01); C23C 18/31 (2006.01)
CPC C23C 18/1669 (2013.01) [B05C 3/005 (2013.01); B05C 3/132 (2013.01); C23C 18/1628 (2013.01); C23C 18/163 (2013.01); C23C 18/31 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An apparatus (1) for the electroless metallization of a target surface of a plurality of workpieces (5), comprising:
a vessel (10) for receiving a metallization solution with an inlet (15) and an outlet (16) for the metallization solution, and
a holder (20) for holding the plurality of workpieces (5), which can be arranged in the vessel (10),
wherein a diffuser plate (30) is provided between the at least one inlet (15) and the holder (20), which has a plurality of diffuser openings (35) spaced apart in a plane of a plate (E),
wherein a movement device (40) is provided, which can move the diffuser plate (30) in at least one direction in space in the vessel (10),
wherein a first diffuser opening (35), from among the plurality of diffuser openings (35), has:
a first cross-sectional area (A1) on a first side (31) of the diffuser plate (30), and
a second cross-sectional area (A2) on a second side (32) of the diffuser plate (30), opposite to the first side (31) thereof,
wherein the first cross-sectional area (A1) is greater than the second cross-sectional area (A2),
wherein the second side (32) of the diffuser plate (30) faces the plurality of workpieces (5),
wherein the first diffuser opening (35) is conical or cone-shaped,
wherein the diffuser plate (30) is movable in a direction parallel to a normal vector of the plane of a plate (E), and
wherein the holder (20) is connected to the movement device (40).