| CPC C23C 16/52 (2013.01) [C23C 16/4486 (2013.01); C23C 16/505 (2013.01)] | 20 Claims |
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1. A flow rate control method comprising:
supplying a fluid from a valve to a first sensor;
measuring, by the first sensor, a first temperature of the fluid, and heating the fluid;
measuring, by a second sensor, a second temperature of the heated fluid, and determining, by a controller, a first flow rate of the fluid based on comparison between the first temperature and the second temperature;
supplying the fluid to a chamber and supplying an ignition voltage to the chamber through a radio frequency (RF) power source;
measuring, by a third sensor, the ignition voltage;
comparing, by the controller, the ignition voltage and a reference voltage to determine a second flow rate of the fluid; and
controlling a supply of the fluid from the valve based on at least one of the first flow rate and or the second flow rate.
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