US 12,247,286 B2
Heater assembly including cooling apparatus and method of using same
Carl Louis White, Gilbert, AZ (US); Eric James Shero, Phoenix, AZ (US); Kyle Fondurulia, Phoenix, AZ (US); and Timothy James Sullivan, Gilbert, AZ (US)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on Aug. 3, 2020, as Appl. No. 16/983,364.
Claims priority of provisional application 62/885,149, filed on Aug. 9, 2019.
Prior Publication US 2021/0040613 A1, Feb. 11, 2021
Int. Cl. F28F 7/00 (2006.01); C23C 16/455 (2006.01); C23C 16/52 (2006.01)
CPC C23C 16/45544 (2013.01) [C23C 16/45561 (2013.01); C23C 16/52 (2013.01)] 11 Claims
OG exemplary drawing
 
1. An assembly comprising:
a precursor source vessel;
a heating plate external of and in thermal contact with the precursor source vessel, wherein the heating plate comprises a heating plate top and a heating plate bottom; and
a cooling plate external of the precursor source vessel and in thermal contact with the heating plate, wherein the cooling plate comprises a top side and a bottom side and the heating plate bottom is disposed on the top side of the cooling plate, wherein the heating plate heats an interior of the precursor source vessel, and wherein the cooling plate removes heat from the heating plate; and
wherein the bottom side is in thermal contact with one or more cooling lines defining a fluid path that runs across a portion of the bottom side of the cooling plate.