	US 12,247,282 B2
	Evaporator boats for metallization installations
Zhiquan Guo, Shanghai (CN); Mark Han, Shanghai (CN); Chandler Du, Shanghai (CN); Jason Goldsmith, Greensburg, PA (US); and Rob Lattimer, Wilton, CT (US)
Assigned to KENNAMETAL INC., Latrobe, PA (US)
Filed by Kennametal Inc., Latrobe, PA (US)
Filed on Mar. 24, 2017, as Appl. No. 15/469,192.
Prior Publication US 2019/0203344 A1, Jul. 4, 2019
Int. Cl. C23C 14/24 (2006.01); B23B 3/02 (2006.01); B28B 3/02 (2006.01); C23C 14/14 (2006.01); C23C 14/26 (2006.01)

CPC C23C 14/243 (2013.01) [B28B 3/025 (2013.01); C23C 14/14 (2013.01); C23C 14/26 (2013.01)]

13 Claims

1. An evaporator boat comprising:

a body and an evaporator surface on the body, the body comprising:

a boron nitride (BN) component including BN grains; and

a titanium diboride (TiB₂) component including grains formed of a solid solution of TiB₂and one or more elements selected from the group consisting of silicon and metallic elements of Groups IVB-VIIIB of the Periodic Table, wherein

grain boundaries are formed at interfaces between the BN grains and the TiB₂solid solution grains,

wherein grains of the TiB₂component have an average size of 1 μm to 20 μm, and

wherein the BN component comprises a solid solution of BN and at least one transition metal selected from Groups IVB-VIIIB of the Periodic Table.