US 12,247,279 B2
Method for preparing a conductive, transparent and flexible membrane
Abdel-Aziz El Mel, Nantes (FR); Pierre-Yves Tessier, Nantes (FR); and Adrien Chauvin, Pouance (FR)
Assigned to Centre national de la recherche scientifique, Paris (FR); and Nantes University, Nantes (FR)
Filed by Centre national de la recherche scientifique, Paris (FR); and Nantes University, Nantes (FR)
Filed on Feb. 11, 2022, as Appl. No. 17/669,850.
Application 17/669,850 is a continuation of application No. 16/615,387, granted, now 11,279,998, previously published as PCT/EP2018/063308, filed on May 22, 2018.
Claims priority of application No. 17 54647 (FR), filed on May 24, 2017.
Prior Publication US 2022/0162736 A1, May 26, 2022
Int. Cl. C23C 14/24 (2006.01); C23C 14/00 (2006.01); C23C 14/16 (2006.01); C23C 14/35 (2006.01); C23C 16/06 (2006.01); C23F 1/12 (2006.01); H01B 1/02 (2006.01); H01B 13/00 (2006.01); G06F 3/041 (2006.01); G06F 3/047 (2006.01); H01L 31/0224 (2006.01); H01L 31/18 (2006.01)
CPC C23C 14/0005 (2013.01) [C23C 14/165 (2013.01); C23C 14/24 (2013.01); C23C 14/35 (2013.01); C23C 16/06 (2013.01); C23F 1/12 (2013.01); H01B 1/02 (2013.01); H01B 13/0036 (2013.01); G06F 3/0412 (2013.01); G06F 3/047 (2013.01); G06F 2203/04112 (2013.01); H01L 31/022491 (2013.01); H01L 31/1888 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A continuous nanomesh metal membrane, having a thickness between 1 and 20 nm, wherein the nanomesh metal membrane comprises an interconnected network of nanomesh metal domains, wherein each nanomesh metal domain has a size less than 10,000 square micrometers, wherein the nanomesh metal domains are interconnected by metallic nanoligaments and wherein the continuous nanomesh metal membrane has a first nanometric scale that defines interconnections within the nanomesh metal domains by nanoligaments and a second micrometric scale that defines interconnections between the nanomesh metal domains.