US 12,246,963 B2
Hydrogen recycle system and hydrogen recycle method
Shinji Kambara, Aichi (JP); Yukio Hayakawa, Aichi (JP); Tomonori Miura, Gunma (JP); and Tatsuya Ikeda, Gunma (JP)
Assigned to National University Corporation Tokai National Higher Education and Research System, Aichi (JP); and SAWAFUJI ELECTRIC CO., LTD., Gunma (JP)
Filed by National University Corporation Tokai National Higher Education and Research System, Aichi (JP); and SAWAFUJI ELECTRIC CO., LTD., Gunma (JP)
Filed on Mar. 7, 2024, as Appl. No. 18/598,591.
Application 18/598,591 is a division of application No. 17/056,265, granted, now 12,024,427, previously published as PCT/JP2019/019628, filed on May 17, 2019.
Claims priority of application No. 2018-107532 (JP), filed on Jun. 5, 2018.
Prior Publication US 2024/0217811 A1, Jul. 4, 2024
Int. Cl. C01B 3/04 (2006.01); B01D 53/04 (2006.01); B01D 53/22 (2006.01); C01B 3/50 (2006.01); C01B 3/56 (2006.01); C23C 16/30 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C30B 25/14 (2006.01); C30B 29/40 (2006.01); H01L 21/02 (2006.01); H01M 8/0606 (2016.01)
CPC C01B 3/047 (2013.01) [B01D 53/04 (2013.01); B01D 53/229 (2013.01); C01B 3/503 (2013.01); C01B 3/56 (2013.01); C23C 16/303 (2013.01); C23C 16/4412 (2013.01); C23C 16/45593 (2013.01); C30B 25/14 (2013.01); C30B 29/406 (2013.01); H01L 21/0254 (2013.01); H01L 21/0262 (2013.01); B01D 2053/221 (2013.01); B01D 2253/104 (2013.01); B01D 2253/108 (2013.01); B01D 2256/16 (2013.01); B01D 2259/40083 (2013.01); B01D 2259/45 (2013.01); C01B 2203/041 (2013.01); C01B 2203/0425 (2013.01); C01B 2203/0861 (2013.01); H01M 8/0606 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A hydrogen recycle system for a nitride compound production device, the hydrogen recycle system comprising:
an exhaust gas supply path configured to receive exhaust gas emitted by the nitride compound production device;
a hydrogen recycle means configured to purify hydrogen from the exhaust gas; and
a hydrogen supply path configured to supply the purified hydrogen from the hydrogen recycle means to the nitride compound production device,
wherein the hydrogen recycle means comprises:
a plasma reaction vessel that defines at least a part of a discharge space;
a hydrogen separation membrane that divides the discharge space from a hydrogen flow path communicated with the hydrogen supply path, defines at least a part of the discharge space by one surface thereof and defines at least a part of the hydrogen flow path by the other surface thereof;
an electrode that is disposed outside the discharge space; and
an adsorbent that is filled in the discharge space and configured to adsorb the exhaust gas that is supplied.