US 12,246,482 B2
Control apparatus, imprint apparatus, and method of manufacturing article
Ryo Nawata, Tochigi (JP); Hiroyuki Sekiguchi, Tochigi (JP); Takashi Shibayama, Tochigi (JP); and Yuma Onizawa, Tochigi (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Aug. 24, 2021, as Appl. No. 17/410,191.
Claims priority of application No. 2020-144872 (JP), filed on Aug. 28, 2020.
Prior Publication US 2022/0063176 A1, Mar. 3, 2022
Int. Cl. G05B 19/404 (2006.01); B29C 59/00 (2006.01); B29C 59/02 (2006.01); G05D 19/00 (2006.01); G05D 19/02 (2006.01); G06N 20/00 (2019.01); H01L 21/66 (2006.01)
CPC B29C 59/002 (2013.01) [B29C 59/02 (2013.01); G05B 19/404 (2013.01); G05D 19/00 (2013.01); G05D 19/02 (2013.01); G06N 20/00 (2019.01); H01L 22/20 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A control apparatus that controls a force applied to an object, comprising:
a driver configured to apply the force to the object;
an estimator configured to estimate, based on information related to a state of the object, a disturbance force to be applied to the object via a member connected to the object, using a model that includes a plurality of parameter values indicating one or more characteristics of an attenuation and a stiffness regarding the member; and
a corrector configured to correct a command value provided to the driver so as to reduce an influence of the disturbance force estimated by the estimator,
wherein the model includes a three element model comprising a first spring having a first end connected to the object, and a second spring and a damper which are arranged in parallel and serially connected to a second end of the first spring.