US 12,246,397 B2
Laser processing device for forming a modified region in an object and laser processing method
Takafumi Ogiwara, Hamamatsu (JP); and Takeshi Sakamoto, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Appl. No. 17/641,519
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
PCT Filed Sep. 9, 2020, PCT No. PCT/JP2020/034174
§ 371(c)(1), (2) Date Mar. 9, 2022,
PCT Pub. No. WO2021/049546, PCT Pub. Date Mar. 18, 2021.
Claims priority of application No. 2019-165708 (JP), filed on Sep. 11, 2019.
Prior Publication US 2022/0331907 A1, Oct. 20, 2022
Int. Cl. B23K 26/53 (2014.01); B23K 26/067 (2006.01); H01L 21/268 (2006.01); H01L 21/67 (2006.01); B23K 103/00 (2006.01); G02F 1/133 (2006.01)
CPC B23K 26/53 (2015.10) [B23K 26/0676 (2013.01); H01L 21/268 (2013.01); H01L 21/67115 (2013.01); B23K 2103/56 (2018.08); G02F 1/13306 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A laser processing apparatus for forming a modified region in an object by irradiating the object with laser light, the apparatus comprising:
a support part configured to support the object having a first surface and a second surface on an opposite side of the first surface so that the second surface is perpendicular to a Z direction;
a light source configured to emit the laser light;
a spatial light modulator configured to modulate the laser light emitted from the light source;
a converging part configured to converge the laser light modulated by the spatial light modulator from the second surface side to the object; and
a controller configured to control the spatial light modulator so that the laser light is branched into a plurality of rays of processing light including 0th-order light and a plurality of converging points for the plurality of rays of the processing light are located at positions different from each other in the Z direction and an X direction perpendicular to the Z direction, and control at least one of the support part and the converging part so that the X direction coincides with an extension direction of a line extending along the second surface and the plurality of converging points move relatively along the line, wherein
the controller controls the spatial light modulator so that a converging point of the 0th-order light in the Z direction is located on an opposite side of a converging point of non-modulated light of the laser light with respect to an ideal converging point of the 0th-order light or on an opposite side of the ideal converging point of the 0th-order light with respect to the converging point of the non-modulated light.