US 12,246,361 B2
Pod cleaning chamber
Young Soo Park, Anseong-si (KR); Dong Geun Hur, Anseong-si (KR); and Ki Man Lee, Anseong-si (KR)
Assigned to STI Co., Ltd., Anseong-si (KR)
Filed by STI Co., Ltd., Anseong-si (KR)
Filed on Nov. 16, 2021, as Appl. No. 17/527,211.
Claims priority of application No. 10-2020-0152756 (KR), filed on Nov. 16, 2020.
Prior Publication US 2022/0152660 A1, May 19, 2022
Int. Cl. B08B 3/02 (2006.01); B08B 13/00 (2006.01); F26B 3/04 (2006.01); F26B 3/30 (2006.01); G03F 7/00 (2006.01)
CPC B08B 3/022 (2013.01) [B08B 13/00 (2013.01); F26B 3/04 (2013.01); F26B 3/30 (2013.01); G03F 7/70925 (2013.01); B08B 2230/01 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A POD cleaning chamber comprising:
a cleaning sub-chamber including an entrance door and accommodating and cleaning a separation POD being transported, the separation POD resulting from separating a POD;
a drying chamber including an exit door and drying the separation POD transferred from the cleaning sub-chamber;
a shutter being arranged between the cleaning sub-chamber and the drying chamber, the shutter being configured to ascend and descend; and
a chamber moving mechanism transporting the separation POD from the cleaning sub-chamber to the drying chamber, comprising:
a jig on which the separation POD is stably mounted, and a moving unit coupled to the jig to move the jig,
wherein the moving unit is arranged outside the cleaning sub-chamber and the drying chamber,
wherein the jig comprises a holding jig for supporting the separation POD and a coupling jig for connecting the holding jig to the moving unit,
wherein the holding jig comprises:
a first portion coupled to the coupling jig to downward at a right angle,
a second portion extending from an end of the first portion at an inclination and arrived to the separation POD, and
support pins provided to be coupled to the second portion and arranged on a lower portion of the second portion to support a lower portion of the separation POD, and arranged on side surfaces of a frame to support both side surfaces of the separation POD and a rear surface thereof,
wherein the second portion formed to have a rectangular cross-section having a greater size than an external edge of the separation POD so that the holding jig exposed to both the lateral sides of the separation POD.