US 11,923,821 B2
Transversely-excited film bulk acoustic resonator with reduced spurious modes
Soumya Yandrapalli, Lausannne (CH); Viktor Plesski, Gorgier (CH); Julius Koskela, Helsinki (FI); Ventsislav Yantchev, Sofia (BG); and Patrick Turner, San Bruno, CA (US)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Jun. 17, 2021, as Appl. No. 17/351,203.
Application 17/351,203 is a continuation of application No. 17/030,066, filed on Sep. 23, 2020, granted, now 11,146,232.
Application 17/030,066 is a continuation in part of application No. 16/920,173, filed on Jul. 2, 2020, granted, now 11,139,794.
Application 16/920,173 is a continuation of application No. 16/438,121, filed on Jun. 11, 2019, granted, now 10,756,697, issued on Aug. 25, 2020.
Application 16/438,121 is a continuation in part of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Claims priority of provisional application 62/904,386, filed on Sep. 23, 2019.
Claims priority of provisional application 62/753,815, filed on Oct. 31, 2018.
Claims priority of provisional application 62/748,883, filed on Oct. 22, 2018.
Claims priority of provisional application 62/741,702, filed on Oct. 5, 2018.
Claims priority of provisional application 62/701,363, filed on Jul. 20, 2018.
Claims priority of provisional application 62/685,825, filed on Jun. 15, 2018.
Prior Publication US 2021/0313952 A1, Oct. 7, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/02 (2006.01); H03H 3/04 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H03H 9/56 (2006.01); H03H 3/02 (2006.01)
CPC H03H 9/02228 (2013.01) [H03H 3/04 (2013.01); H03H 9/02031 (2013.01); H03H 9/132 (2013.01); H03H 9/174 (2013.01); H03H 9/176 (2013.01); H03H 9/562 (2013.01); H03H 9/564 (2013.01); H03H 9/568 (2013.01); H03H 2003/023 (2013.01); H03H 2003/0442 (2013.01)] 21 Claims
OG exemplary drawing
 
1. An acoustic resonator device comprising:
a substrate;
a piezoelectric plate comprising a diaphragm that spans a cavity; and
a conductor pattern comprising an interdigital transducer (IDT) with interleaved parallel fingers at the diaphragm,
wherein a width of either one of two adjacent parallel fingers is greater than or equal to 0.2 times a center-to-center spacing between the two adjacent parallel fingers and less than or equal to 0.3 times the center-to-center spacing between the two adjacent parallel fingers.