US 11,923,465 B2
Photodiode comprising a memory area
Arnaud Tournier, Grenoble (FR); Boris Rodrigues Goncalves, Theys (FR); and Frederic Lalanne, Bernin (FR)
Assigned to STMicroelectronics (Crolles 2) SAS, Crolles (FR)
Filed by STMicroelectronics (Crolles 2) SAS, Crolles (FR)
Filed on Dec. 17, 2020, as Appl. No. 17/125,654.
Claims priority of application No. 1914879 (FR), filed on Dec. 19, 2019; and application No. 1914885 (FR), filed on Dec. 19, 2019.
Prior Publication US 2021/0193849 A1, Jun. 24, 2021
Int. Cl. H01L 31/02 (2006.01); H01L 27/146 (2006.01)
CPC H01L 31/02019 (2013.01) [H01L 27/14603 (2013.01); H01L 27/14609 (2013.01); H01L 27/1463 (2013.01); H01L 31/02005 (2013.01); H01L 27/14643 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A photodiode, comprising:
an active area; and
a memory area adjacent to the active area, the memory area including:
a first storage region and a second storage region;
a first insulated conductive wall proximal to the active area and between the first storage region and the active area, the first insulated conductive wall extending along a first direction;
a first opening in the first insulated conductive wall, the first opening extending between the first storage region and the active area;
a second insulated conductive wall coupled to the first insulated conductive wall, the second insulated conductive wall extending along a second direction that is transverse to the first direction;
a third insulated conductive wall between the first storage region and the second storage region, the third insulated conductive wall including a first portion extending along the first direction and a second portion aligned with the first portion along the first direction, the second portion being separated from the first portion and being between the first portion and the second insulated conductive wall;
a second opening between the first portion and a first side of the second portion of the second insulated conductive wall, the second opening extending between the first storage region and the second storage region; and
a third opening at a second side of the second portion that is opposite to the first side, the third opening extending between the first storage region and the second storage region.