US 11,923,307 B2
Microelectronic structures including bridges
Bai Nie, Chandler, AZ (US); Gang Duan, Chandler, AZ (US); Omkar G. Karhade, Chandler, AZ (US); Nitin A. Deshpande, Chandler, AZ (US); Yikang Deng, Chandler, AZ (US); Wei-Lun Jen, Chandler, AZ (US); Tarek A. Ibrahim, Mesa, AZ (US); Sri Ranga Sai Boyapati, Chandler, AZ (US); Robert Alan May, Chandler, AZ (US); Yosuke Kanaoka, Chandler, AZ (US); Robin Shea McRee, Chandler, AZ (US); and Rahul N. Manepalli, Chandler, AZ (US)
Assigned to Intel Corporation, Santa Clara, CA (US)
Filed by Intel Corporation, Santa Clara, CA (US)
Filed on Jun. 16, 2020, as Appl. No. 16/902,958.
Prior Publication US 2021/0391263 A1, Dec. 16, 2021
Int. Cl. H01L 23/538 (2006.01); H01L 21/48 (2006.01)
CPC H01L 23/5381 (2013.01) [H01L 21/4857 (2013.01); H01L 23/5383 (2013.01); H01L 23/5386 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A microelectronic structure, comprising:
a substrate including a first layer, a last layer, and one or more interior layers between the first layer and the last layer;
a cavity in a face of the substrate, wherein the face of the substrate is proximate to the last layer, and the cavity extends through and past the last layer;
a metal at a bottom of the cavity;
a bridge component in the cavity, wherein the bridge component includes a first face and an opposing second face, the second face of the bridge component is between the first face of the bridge component and the substrate, and the bridge component includes conductive contacts at the first face of the bridge component; and
an adhesive between the bridge component and the metal, wherein the adhesive includes a first adhesive region and a second adhesive region, and a material composition of the first adhesive region is different from a material composition of the second adhesive region.