US 11,923,224 B2
Carrier positioning member and carrier placement platform
Koichiro Hori, Tokyo (JP); Toru Kosaki, Tokyo (JP); and Wataru Yamada, Tokyo (JP)
Assigned to Mitsubishi Electric Corporation, Tokyo (JP)
Appl. No. 17/257,713
Filed by Mitsubishi Electric Corporation, Tokyo (JP)
PCT Filed Sep. 6, 2018, PCT No. PCT/JP2018/032964
§ 371(c)(1), (2) Date Jan. 4, 2021,
PCT Pub. No. WO2020/049671, PCT Pub. Date Mar. 12, 2020.
Prior Publication US 2021/0175097 A1, Jun. 10, 2021
Int. Cl. H01L 21/673 (2006.01); H01L 21/68 (2006.01)
CPC H01L 21/6732 (2013.01) [H01L 21/68 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A carrier positioning member that is fixed to a base and that positions, on the base, a carrier storing a plurality of plate-shaped loads such that front faces or rear faces thereof face the base, the carrier positioning member comprising:
two front-side stoppers that come into contact with two opening edge parts being end parts of an opening of the carrier to restrict movement of the carrier to a front side; and
two rear-side stoppers that come into contact with two plate-shaped end parts formed on a rear side in the carrier to restrict movement of the carrier to the rear side and movement in a direction vertical to the base, wherein
the positioning member is fixed without moving to the base when the carrier is placed on the base or when the carrier is moved from the base, and
the front side is a side in the opening of the carrier in which the plate-shaped loads are taken in and out, and the rear side is a side opposite to the opening of the carrier.