US 11,923,222 B2
Substrate transfer device and substrate gripping determination method
Toshiaki Kodama, Nirasaki (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on May 20, 2021, as Appl. No. 17/325,704.
Claims priority of application No. 2020-089832 (JP), filed on May 22, 2020.
Prior Publication US 2021/0366747 A1, Nov. 25, 2021
Int. Cl. H01L 21/67 (2006.01); B25J 9/04 (2006.01); B25J 9/16 (2006.01); B25J 13/08 (2006.01); B25J 15/00 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/67259 (2013.01) [B25J 9/1612 (2013.01); B25J 9/163 (2013.01); B25J 9/1674 (2013.01); B25J 13/082 (2013.01); B25J 15/0014 (2013.01); H01L 21/68707 (2013.01); B25J 9/042 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A substrate transfer device comprising:
a support part configured to support a substrate to be transferred and provided with a plurality of engagement portions which are engaged with an edge of the substrate on a first side of the substrate;
a gripping part configured to move toward or away from the plurality of engagement portions and provided with a plurality of contact portions which come into contact with the edge of the substrate on a second side of the substrate when moving toward the plurality of engagement portions;
at least one of a plurality of detection parts provided in each of the plurality of contact portions, respectively, the plurality of detection parts being configured to detect distortion amounts of the plurality of contact portions; and
a determination part configured to determine a gripping situation of the substrate based on a degree of the distortion amounts obtained by the plurality of detection parts,
wherein when the distortion amount detected by one of the plurality of detection parts is equal to or greater than a first threshold and a difference in the distortion amounts detected by the plurality of detection parts is equal to or greater than a second threshold, the determination part determines that a defective gripping has occurred.