US 11,923,213 B2
Substrate heating unit, substrate processing apparatus, and substrate processing method
Tae Shin Kim, Suwon-si (KR); Young Dae Chung, Incheon (KR); Ji Hoon Jeong, Hwaseong-si (KR); Jee Young Lee, Incheon (KR); and Won Geun Kim, Goyang-si (KR)
Assigned to SEMES CO., LTD., Cheonan-si (KR)
Filed by SEMES CO., LTD., Cheonan-si (KR)
Filed on Dec. 20, 2020, as Appl. No. 17/128,159.
Claims priority of application No. 10-2019-0175714 (KR), filed on Dec. 26, 2019.
Prior Publication US 2021/0202280 A1, Jul. 1, 2021
Int. Cl. H01L 23/00 (2006.01); B08B 3/10 (2006.01); B23K 26/00 (2014.01); B23K 26/06 (2014.01); B23K 26/064 (2014.01); B23K 26/352 (2014.01); G02B 7/02 (2021.01); G02B 27/09 (2006.01); H01L 21/02 (2006.01); H01L 21/268 (2006.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); B23K 101/40 (2006.01); B23K 103/00 (2006.01)
CPC H01L 21/67115 (2013.01) [B08B 3/10 (2013.01); B23K 26/0006 (2013.01); B23K 26/0604 (2013.01); B23K 26/0626 (2013.01); B23K 26/064 (2015.10); B23K 26/352 (2015.10); G02B 7/028 (2013.01); G02B 27/0916 (2013.01); G02B 27/0955 (2013.01); H01L 21/02057 (2013.01); H01L 21/268 (2013.01); H01L 21/67051 (2013.01); H01L 21/67248 (2013.01); H01L 21/68764 (2013.01); H01L 22/20 (2013.01); B23K 2101/40 (2018.08); B23K 2103/56 (2018.08)] 17 Claims
OG exemplary drawing
 
1. A substrate heating unit comprising:
a laser generator configured to generate a first laser beam which is directed toward a substrate; and
a beam shaper configured to shape an energy distribution of the first laser beam received from the laser generator to selectively provide the substrate with a second laser beam having one of a uniform energy distribution over the substrate and an edge-enhanced energy distribution in which a first portion of the second laser beam is directed toward an edge portion of the substrate, and a second portion of the second laser beam is directed toward a central portion of the substrate, wherein the first portion of the second laser beam has an energy intensity higher than an energy intensity of the second portion of the second laser beam.