US 11,923,211 B2
Correction data creating method, substrate processing method, and substrate processing system
Hiroki Endo, Miyagi (JP); and Tomohisa Kitayama, Miyagi (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed by TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed on Jun. 24, 2020, as Appl. No. 16/911,130.
Claims priority of application No. 2019-121738 (JP), filed on Jun. 28, 2019.
Prior Publication US 2020/0411339 A1, Dec. 31, 2020
Int. Cl. H01L 21/67 (2006.01); F27D 5/00 (2006.01); H01J 37/32 (2006.01); H01L 21/683 (2006.01); H05B 1/02 (2006.01); H05B 3/22 (2006.01)
CPC H01L 21/67103 (2013.01) [F27D 5/0037 (2013.01); H01J 37/32724 (2013.01); H01L 21/67248 (2013.01); H01L 21/6833 (2013.01); H05B 1/0233 (2013.01); H05B 3/22 (2013.01); H01J 2237/2001 (2013.01); H05B 2203/005 (2013.01); H05B 2203/035 (2013.01); H05B 2213/07 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A method for creating correction data comprising:
selecting a setting voltage among a plurality of setting voltages determined in advance,
supplying the selected setting voltage to a heater for heating a substrate support on which a substrate is supported;
adjusting, at the setting voltage supplied to the heater, a power supplied to the heater such that a resistance of the heater becomes a resistance value corresponding to a predetermined first temperature based on temperature conversion data indicating a relationship between the resistance of the heater and a temperature of the heater;
measuring a temperature of the substrate support, at a position where the heater is disposed, as a second temperature;
calculating a correction value corresponding to a difference between the predetermined first temperature and the second temperature; and
creating correction data indicating a corresponding relationship between each of the setting voltages and the correction value,
wherein said selecting, said supplying, said adjusting, said measuring of the temperature, said calculating of the correction value, and said creating are executed for each of the setting voltages, and
the correction data is created for each of the setting voltages.