US 11,923,185 B2
Method of fabricating a high-pressure laser-sustained-plasma lamp
Mark S. Wang, San Ramon, CA (US); and Joshua Wittenberg, Fremont, CA (US)
Assigned to KLA Corporation, Milpitas, CA (US)
Filed by KLA Corporation, Milpitas, CA (US)
Filed on Jun. 10, 2022, as Appl. No. 17/837,889.
Claims priority of provisional application 63/211,003, filed on Jun. 16, 2021.
Prior Publication US 2022/0406553 A1, Dec. 22, 2022
Int. Cl. H01J 9/26 (2006.01); H01J 9/24 (2006.01); H01J 61/54 (2006.01)
CPC H01J 9/266 (2013.01) [H01J 9/247 (2013.01); H01J 61/54 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A method of forming a high-pressure plasma lamp comprising:
providing a lamp bulb, the lamp bulb including a top channel and a bottom channel;
inserting a top electrode element into the top channel of the lamp bulb;
providing a glass tubular structure attached to a bottom electrode element, wherein the bottom electrode element includes a multi-step thickness profile, wherein an internal structure of the glass tubular structure conforms to a portion of the multi-step thickness profile of the bottom electrode element and wherein the outer surface of the bottom electrode element and the outer surface of the glass tubular structure are coextensive;
filling the lamp bulb with a liquified gas through the bottom channel of the lamp bulb; and
inserting the bottom electrode element and the glass tubular structure into the bottom channel.