| CPC H01J 37/32183 (2013.01) [H05H 1/4645 (2021.05)] | 20 Claims |
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1. A matching network for a plasma processing system operatively connected between a radio frequency source and a plasma processing chamber comprising a match tuning capacitor, a tuning motor for changing capacitance of the match tuning capacitor, and a controller for driving the tuning motor by performing steps comprising:
receiving one or more measurements from the plasma processing system;
determining one or more factors based on the one or more measurements;
determining a gain setting based the one or more factors;
providing the gain setting to the tuning motor to change the capacitance of the match tuning capacitor; and
repeating the previous steps to apply variable gain to the tuning motor to dampen adjustment of the tuning motor within different regions of operation of the match tuning capacitor in response to changes occurring over successive measurements during operation of the plasma processing system;
wherein the variable gain avoids over-damped and under-damped adjustment of the tuning motor in the different regions of operation of the match tuning capacitor.
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