US 11,923,138 B2
Collecting device and collecting method
Sho Kato, Mie (JP); Yuji Yamada, Mie (JP); and Jiahong Wu, Mie (JP)
Assigned to KIOXIA CORPORATION, Tokyo (JP)
Filed by Kioxia Corporation, Tokyo (JP)
Filed on Feb. 28, 2022, as Appl. No. 17/682,934.
Claims priority of application No. 2021-146835 (JP), filed on Sep. 9, 2021.
Prior Publication US 2023/0070820 A1, Mar. 9, 2023
Int. Cl. H01F 7/20 (2006.01); G01N 1/02 (2006.01); G01N 1/04 (2006.01); G01N 33/202 (2019.01); H01F 1/44 (2006.01); H01J 49/10 (2006.01); B01D 11/02 (2006.01); G01N 1/10 (2006.01); G01N 1/40 (2006.01); G01N 33/00 (2006.01); H01J 49/00 (2006.01)
CPC H01F 7/20 (2013.01) [G01N 1/04 (2013.01); G01N 33/202 (2019.01); H01F 1/44 (2013.01); H01J 49/105 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A collecting device comprising:
a stage configured to support a substrate;
a magnetic field generator configured to hold, by a magnetic field, a first liquid containing a magnetic fluid and a collecting liquid, and to bring the first liquid into contact with at least an end portion of the substrate;
a collector configured to collect the first liquid from the magnetic field generator; and
a separator configured to separate the collecting liquid from the first liquid.