US 11,921,151 B2
Jig for inspection apparatus, inspection apparatus, and inspection set
Myong Kang, Gunpo-si (KR); Kang Jo Hwang, Seoul (KR); and Choung Min Jung, Siheung-si (KR)
Assigned to KOH YOUNG TECHNOLOGY INC., Seoul (KR)
Appl. No. 17/425,497
Filed by KOH YOUNG TECHNOLOGY INC., Seoul (KR)
PCT Filed Jan. 22, 2020, PCT No. PCT/KR2020/001073
§ 371(c)(1), (2) Date Jul. 23, 2021,
PCT Pub. No. WO2020/153741, PCT Pub. Date Jul. 30, 2020.
Claims priority of application No. 10-2019-0009391 (KR), filed on Jan. 24, 2019.
Prior Publication US 2022/0091179 A1, Mar. 24, 2022
Int. Cl. G01R 31/28 (2006.01); G01R 1/04 (2006.01); G01R 1/067 (2006.01); G01R 1/073 (2006.01); G01R 31/304 (2006.01)
CPC G01R 31/2808 (2013.01) 16 Claims
OG exemplary drawing
 
1. An inspection set, comprising:
a jig configured to allow an inspection object to be seated thereon; and
an inspection apparatus configured to inspect the inspection object, the jig capable of being introduced into and withdrawn from the inspection apparatus, wherein
the jig includes at least one damper configured to be capable of moving in a clamping direction in which the inspection object is clamped to the jig and to be capable of moving in an unclamping direction opposite to the clamping direction,
the inspection apparatus includes:
a mover configured to move the jig; and
at least one clamping driver configured to contact and press the clamper,
the jig includes an elastic member configured to provide an elastic force to press the damper in the clamping direction, and
the clamping driver includes a pressing portion configured to press the damper in the unclamping direction.