US 11,921,141 B2
Broadband radiation sensor based on a resonantly-coupled graphene SNS junction
Raj M. Katti, Pasadena, CA (US); Harpreet Singh Arora, Pasadena, CA (US); Keith C. Schwab, Pasadena, CA (US); Michael L Roukes, Pasadena, CA (US); and Stevan Nadj-Perge, Pasadena, CA (US)
Assigned to California Institute of Technology, Pasadena, CA (US)
Filed by California Institute of Technology, Pasadena, CA (US)
Filed on Mar. 3, 2021, as Appl. No. 17/191,443.
Claims priority of provisional application 62/984,451, filed on Mar. 3, 2020.
Prior Publication US 2021/0311101 A1, Oct. 7, 2021
Int. Cl. H01L 31/112 (2006.01); G01R 29/08 (2006.01); G01R 31/28 (2006.01); H01L 31/02 (2006.01); H01L 31/101 (2006.01); H10N 60/12 (2023.01)
CPC G01R 29/0878 (2013.01) [G01R 31/2824 (2013.01); H01L 31/02019 (2013.01); H01L 31/1013 (2013.01); H01L 31/112 (2013.01); H10N 60/12 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A radiation sensor comprising:
an electrical signal path for carrying electrical signals; and
a resonance structure connected to the electrical signal path, the resonance structure comprising:
a resonator having a resonant frequency;
a graphene junction connected in series with the resonator, the graphene junction including a graphene layer and having an impedance that is dependent on a temperature of the graphene layer, wherein the graphene junction is connected between the resonator and ground; and
a heating element that is thermally coupled to the graphene layer and is configured to receive an incident photon, wherein the temperature of the graphene layer increases in response to the heating element receiving the incident photon.