US 11,921,080 B2
Gas sensor array having shared field effect transistor
Kook Nyung Lee, Seoul (KR); Woo Kyeong Seong, Seongnam-si (KR); Won Hyo Kim, Yongin-si (KR); Dong Ki Hong, Pyeongtaek-si (KR); and Hye Lim Kang, Chungcheongbuk-do (KR)
Assigned to KOREA ELECTRONICS TECHNOLOGY INSTITUTE, Seongnam-si (KR)
Filed by KOREA ELECTRONICS TECHNOLOGY INSTITUTE, Seongnam-si (KR)
Filed on Dec. 31, 2020, as Appl. No. 17/139,517.
Claims priority of application No. 10-2020-0019832 (KR), filed on Feb. 18, 2020.
Prior Publication US 2021/0255139 A1, Aug. 19, 2021
Int. Cl. G01N 27/414 (2006.01)
CPC G01N 27/4141 (2013.01) 10 Claims
OG exemplary drawing
 
1. A gas sensor, comprising:
a single FET device including a first gate electrode and a second gate electrode;
a sensor array part including a plurality of sensors, in which a first electrode of each sensor of the plurality of sensors is connected to the second gate electrode of the single FET device; and
a controller configured to detect a gas using a current between a drain and a source of the single FET device in response to voltage changes in the second gate electrode of the single FET device,
wherein each sensor of the plurality of sensors includes:
the first electrode connected to the second gate electrode of the single FET device;
a second electrode configured to receive an operating voltage through a switch controlled by the controller; and
a detection film interposed between the first electrode and the second electrode, and
wherein the first gate electrode is configured to apply with a reference voltage setting the current between the drain and the source as an initial value.