US 11,920,966 B2
Flow rate sensor device
Yasuyuki Katase, Nagano (JP); and Yoji Kobayashi, Nagano (JP)
Assigned to KOA CORPORATION, Nagano (JP)
Appl. No. 17/276,357
Filed by KOA CORPORATION, Nagano (JP)
PCT Filed Sep. 19, 2019, PCT No. PCT/JP2019/036827
§ 371(c)(1), (2) Date Mar. 15, 2021,
PCT Pub. No. WO2020/059822, PCT Pub. Date Mar. 26, 2020.
Claims priority of application No. 2018-177994 (JP), filed on Sep. 21, 2018.
Prior Publication US 2022/0011145 A1, Jan. 13, 2022
Int. Cl. G01F 1/696 (2006.01); G01F 1/684 (2006.01)
CPC G01F 1/696 (2013.01) [G01F 1/6847 (2013.01)] 3 Claims
OG exemplary drawing
 
1. A flow rate sensor device comprising:
a sensor element that detects a flow rate;
a unit body including a sensor unit in which the sensor element is mounted; and
a case accommodating the unit body,
wherein
the sensor unit is supported away from a bottom surface of the case,
the unit body has the sensor unit, a drive substrate having a drive control circuit, and a connection portion connecting the sensor unit and the drive substrate,
the bottom surface of the case includes a first bottom surface facing the sensor unit and a second bottom surface facing the connection portion, and the second bottom surface projects more than the first bottom surface, and
the connection portion is in contact with the second bottom surface, and the sensor unit is away from the first bottom surface.