US 11,920,578 B2
Valve and fluid control device including valve
Hiroyuki Yokoi, Kyoto (JP); Nobuhira Tanaka, Kyoto (JP); and Daisuke Kondo, Kyoto (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Kyoto (JP)
Filed by Murata Manufacturing Co., Ltd., Kyoto (JP)
Filed on Sep. 23, 2020, as Appl. No. 17/029,612.
Application 17/029,612 is a continuation of application No. PCT/JP2019/010839, filed on Mar. 15, 2019.
Claims priority of application No. 2018-083287 (JP), filed on Apr. 24, 2018.
Prior Publication US 2021/0003226 A1, Jan. 7, 2021
Int. Cl. F16K 15/14 (2006.01); F04B 43/02 (2006.01); F04B 43/04 (2006.01); F04B 45/047 (2006.01); F16K 15/02 (2006.01); F16K 99/00 (2006.01)
CPC F04B 43/02 (2013.01) [F04B 43/046 (2013.01); F04B 45/047 (2013.01); F16K 15/02 (2013.01); F16K 15/141 (2013.01); F16K 99/0057 (2013.01); F16K 2099/0094 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A valve comprising:
a first plate having a first vent hole;
a second plate defining a valve chamber between the second plate and the first plate, the valve chamber communicating with the first vent hole, and the second plate having a second vent hole communicating with the valve chamber and not facing the first vent hole; and
a movable plate having a third vent hole facing the second vent hole, the movable plate being disposed in the valve chamber such that the movable plate is movable between the first plate and the second plate,
wherein the second plate has an auxiliary hole not facing the third vent hole of the movable plate, the auxiliary hole being surrounded by a first edge portion being a first corner portion having a substantially convex rounded shape in a front view of a principal surface of the second plate at a side facing the valve chamber, and
wherein the substantially convex rounded shape has a radius of greater than or equal to about 0.005 mm and less than or equal to about 0.25 mm.