US 11,920,238 B2
Sealing article comprising metal coating, method of making and method of using the same
Peng-Cheng Hong, Taichung (TW); Jun-Liang Pu, Hsin-Chu (TW); W. L. Hsu, Hsin-Chu (TW); Chung-Hao Kao, Hsin-Chu (TW); Chia-Chun Hung, Taichung (TW); Cheng-Yi Wu, Taichung (TW); and Chin-Szu Lee, Taoyuan (TW)
Assigned to Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu (TW)
Filed by Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu (TW)
Filed on Jul. 22, 2022, as Appl. No. 17/871,810.
Application 17/871,810 is a division of application No. 15/801,497, filed on Nov. 2, 2017.
Claims priority of provisional application 62/564,564, filed on Sep. 28, 2017.
Prior Publication US 2022/0356571 A1, Nov. 10, 2022
Int. Cl. B29D 99/00 (2010.01); C23C 14/02 (2006.01); C23C 14/20 (2006.01); C23C 14/34 (2006.01); C23C 16/44 (2006.01); C23C 18/18 (2006.01); C25D 7/04 (2006.01); H01J 37/32 (2006.01); B29K 19/00 (2006.01); C23C 18/20 (2006.01); C23C 18/24 (2006.01); C23C 18/28 (2006.01); C23C 18/30 (2006.01); C25D 5/56 (2006.01)
CPC C23C 16/4409 (2013.01) [B29D 99/0053 (2013.01); C23C 14/021 (2013.01); C23C 14/205 (2013.01); C23C 14/34 (2013.01); C23C 18/1875 (2013.01); C25D 7/04 (2013.01); H01J 37/32513 (2013.01); B29K 2019/00 (2013.01); C23C 18/2086 (2013.01); C23C 18/24 (2013.01); C23C 18/285 (2013.01); C23C 18/30 (2013.01); C25D 5/56 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of making a sealing article, comprising:
providing a body comprising a polymeric elastomer; and
forming a coating layer on a top surface of the body, the coating layer comprising at least one metal, and
wherein the body defines pores on the top surface only, and the coating layer has a portion interpenetrated into the pores.