US 12,245,409 B2
Electromagnetic shield for a sealing mechanism of a laser chamber
Mohammad Amin Khamehchi, San Diego, CA (US)
Assigned to Cymer, LLC, San Diego, CA (US)
Appl. No. 18/026,874
Filed by Cymer, LLC., San Diego, CA (US)
PCT Filed Aug. 27, 2021, PCT No. PCT/US2021/047881
§ 371(c)(1), (2) Date Mar. 17, 2023,
PCT Pub. No. WO2022/072088, PCT Pub. Date Apr. 7, 2022.
Claims priority of provisional application 63/084,746, filed on Sep. 29, 2020.
Prior Publication US 2023/0320047 A1, Oct. 5, 2023
Int. Cl. H05K 9/00 (2006.01); H01S 3/038 (2006.01); H01S 3/10 (2006.01); H01S 3/225 (2006.01)
CPC H05K 9/0015 (2013.01) [H01S 3/0382 (2013.01); H01S 3/10092 (2013.01); H01S 3/225 (2013.01); H05K 9/0075 (2013.01)] 29 Claims
OG exemplary drawing
 
1. An apparatus for a light source, the apparatus comprising:
an electrical insulator that defines a channel, the channel configured to receive an electrical conductor;
a gasket that surrounds at least a portion of the electrical insulator, the gasket comprising a non-metallic material; and
a shield between the channel and the gasket.