US 12,245,353 B2
Irradiator and plasma apparatus
Tatsuya Matsuo, Kyoto (JP); Yu Nagahara, Kyoto (JP); Takaya Oshita, Ibaraki (JP); and Naomichi Saitou, Kyoto (JP)
Assigned to SEKISUI CHEMICAL CO., LTD., Osaka (JP)
Appl. No. 17/920,514
Filed by SEKISUI CHEMICAL CO., LTD., Osaka (JP)
PCT Filed Mar. 22, 2021, PCT No. PCT/JP2021/011722
§ 371(c)(1), (2) Date Oct. 21, 2022,
PCT Pub. No. WO2021/215170, PCT Pub. Date Oct. 28, 2021.
Claims priority of application No. 2020-077504 (JP), filed on Apr. 24, 2020.
Prior Publication US 2023/0156899 A1, May 18, 2023
Int. Cl. H05H 1/26 (2006.01); A61B 18/04 (2006.01)
CPC H05H 1/26 (2013.01) [A61B 18/042 (2013.01); H05H 2242/20 (2021.05); H05H 2245/32 (2021.05)] 8 Claims
OG exemplary drawing
 
6. An irradiator comprising:
a piezoelectric transformer accommodated in a housing;
a first electrode connected to the piezoelectric transformer, to which a voltage is applied from the piezoelectric transformer;
an irradiation opening that ejects at least one of a plasma generated by the first electrode and an active gas generated by the plasma; and
a second electrode opposed to at least a part of the first electrode;
wherein at least a part of the first electrode is located between the piezoelectric transformer and the irradiation opening; and
the second electrode has a dimension smaller than a dimension of the piezoelectric transformer, in a radial direction perpendicular to an axis of the first electrode.