US 12,245,350 B2
Optical isolation module
Yezheng Tao, San Diego, CA (US); Daniel John William Brown, San Diego, CA (US); Alexander Anthony Schafgans, San Diego, CA (US); and Palash Parijat Das, Oceanside, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Filed by ASML Netherlands B.V., Veldhoven (NL)
Filed on Dec. 6, 2022, as Appl. No. 18/075,589.
Application 18/075,589 is a division of application No. 16/840,714, filed on Apr. 6, 2020, granted, now 11,553,582.
Application 16/840,714 is a division of application No. 15/790,576, filed on Oct. 23, 2017, granted, now 10,645,789, issued on May 5, 2020.
Application 15/790,576 is a division of application No. 14/970,402, filed on Dec. 15, 2015, granted, now 9,832,855, issued on Nov. 28, 2017.
Claims priority of provisional application 62/236,056, filed on Oct. 1, 2015.
Prior Publication US 2023/0139746 A1, May 4, 2023
Int. Cl. H05G 2/00 (2006.01); H01S 3/00 (2006.01); H01S 3/223 (2006.01); H01S 3/23 (2006.01)
CPC H05G 2/008 (2013.01) [H01S 3/0064 (2013.01); H01S 3/2391 (2013.01); H05G 2/003 (2013.01); H01S 3/2232 (2013.01); H01S 3/2308 (2013.01)] 16 Claims
OG exemplary drawing
 
1. An apparatus for an extreme ultraviolet (EUV) light source, the apparatus comprising:
a plurality of dichroic optical elements, each of the dichroic optical elements being configured to reflect light having a wavelength in a first band of wavelengths and to transmit light having a wavelength in a second band of wavelengths; and
an optical modulator positioned on a beam path between two of the dichroic optical elements, the optical modulator positioned to receive reflected light from the two dichroic optical elements, and the optical modulator configured to transmit the received light when the received light propagates in a first direction on the beam path and to deflect the received light away from the beam path when the received light propagates in a second direction on the beam path, the second direction being different from the first direction, wherein
the first band of wavelengths comprises a wavelength of a pre-pulse beam, and
the second band of wavelengths comprises a wavelength of a main beam.