US 12,244,295 B2
Transversely-excited film bulk acoustic resonators with two-layer electrodes having a narrower top layer
Viktor Plesski, Gorgier (CH); Patrick Turner, Portola Valley, CA (US); Robert Hammond, Rockville, MD (US); Bryant Garcia, Mississauga (CA); Ventsislav Yantchev, Sofia (BG); Neal Fenzi, Santa Barbara, CA (US); and Julius Koskela, Helsinki (FI)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Jan. 11, 2024, as Appl. No. 18/410,699.
Application 18/410,699 is a continuation of application No. 17/133,498, filed on Dec. 23, 2020, granted, now 11,909,381.
Application 17/133,498 is a continuation in part of application No. 16/944,831, filed on Jul. 31, 2020, granted, now 11,114,996, issued on Sep. 7, 2021.
Application 16/944,831 is a continuation of application No. 16/779,255, filed on Jan. 31, 2020, granted, now 10,826,462, issued on Nov. 3, 2020.
Application 16/779,255 is a continuation in part of application No. 16/578,811, filed on Sep. 23, 2019, granted, now 10,637,438, issued on Apr. 28, 2020.
Application 16/578,811 is a continuation in part of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Claims priority of provisional application 63/094,796, filed on Oct. 21, 2020.
Claims priority of provisional application 63/019,759, filed on May 4, 2020.
Claims priority of provisional application 62/926,181, filed on Oct. 25, 2019.
Claims priority of provisional application 62/753,815, filed on Oct. 31, 2018.
Claims priority of provisional application 62/748,883, filed on Oct. 22, 2018.
Claims priority of provisional application 62/741,702, filed on Oct. 5, 2018.
Claims priority of provisional application 62/701,363, filed on Jul. 20, 2018.
Prior Publication US 2024/0162886 A1, May 16, 2024
Int. Cl. H03H 9/54 (2006.01); H03H 3/04 (2006.01); H03H 9/02 (2006.01); H03H 9/13 (2006.01)
CPC H03H 9/547 (2013.01) [H03H 3/04 (2013.01); H03H 9/02228 (2013.01); H03H 9/02559 (2013.01); H03H 9/132 (2013.01)] 19 Claims
OG exemplary drawing
 
1. An acoustic resonator comprising:
a substrate;
a piezoelectric layer attached to the substrate either directly or via one or more intermediate layers; and
an interdigital transducer (IDT) at the piezoelectric layer and having a plurality of interleaved fingers that each comprise a first layer adjacent the piezoelectric layer and a second layer over the first layer,
wherein the first layer has a top surface that extends at a first angle relative to the surface of the piezoelectric layer, and the second layer has a sidewall that extends at a second angle relative to the surface of the piezoelectric layer,
wherein the second angle is greater than the first angle, and
wherein a thickness of the first layer is less than a thickness of the second layer, with the respective thicknesses being measured in a direction substantially orthogonal to the surface of the piezoelectric layer.