US 12,244,292 B2
Bulk acoustic wave resonator with stacked piezoelectric layers
Kwang Jae Shin, Yongin (KR); Renfeng Jin, Irvine, CA (US); Benjamin Paul Abbott, Irvine, CA (US); Jong Duk Han, Yongin (KR); Myung Hyun Park, Seongnam-si (KR); and Myeong Gweon Gu, Seoul (KR)
Assigned to SKYWORKS GLOBAL PTE. LTD., Singapore (SG)
Filed by SKYWORKS GLOBAL PTE. LTD., Singapore (SG)
Filed on Oct. 12, 2022, as Appl. No. 18/045,891.
Claims priority of provisional application 63/256,065, filed on Oct. 15, 2021.
Prior Publication US 2023/0124493 A1, Apr. 20, 2023
Int. Cl. H03H 9/17 (2006.01); H03H 3/02 (2006.01); H03H 9/02 (2006.01); H03H 9/13 (2006.01); H03H 9/56 (2006.01)
CPC H03H 9/17 (2013.01) [H03H 3/02 (2013.01); H03H 9/02157 (2013.01); H03H 9/133 (2013.01); H03H 9/568 (2013.01); H03H 2003/023 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A bulk acoustic wave resonator comprising a membrane including a piezoelectric film having an odd number of more than two layers of piezoelectric material, a centermost of the more than two layers of piezoelectric material having a higher doping level than others of the more than two layers of piezoelectric material.