US 12,244,290 B2
Electrode-defined unsuspended acoustic resonator
Wen-Qing Xu, Sarver, PA (US); Di Lan, Edison, NJ (US); and Christopher S. Koeppen, New Hope, PA (US)
Assigned to II-VI DELAWARE, INC., Wilmington, DE (US)
Filed by II-VI Delaware, Inc., Wilmington, DE (US)
Filed on Apr. 10, 2023, as Appl. No. 18/298,267.
Application 18/298,267 is a continuation of application No. 17/661,668, filed on May 2, 2022, granted, now 11,750,169.
Application 17/661,668 is a continuation of application No. 16/874,164, filed on May 14, 2020, granted, now 11,362,640, issued on Jun. 14, 2022.
Application 16/874,164 is a continuation in part of application No. 16/037,499, filed on Jul. 17, 2018, granted, now 11,121,696, issued on Sep. 14, 2021.
Claims priority of provisional application 62/860,426, filed on Jun. 12, 2019.
Claims priority of provisional application 62/699,078, filed on Jul. 17, 2018.
Prior Publication US 2023/0246626 A1, Aug. 3, 2023
Int. Cl. H03H 9/02 (2006.01); H03H 9/13 (2006.01)
CPC H03H 9/02228 (2013.01) [H03H 9/02031 (2013.01); H03H 9/02102 (2013.01); H03H 9/132 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A bulk acoustic resonator, comprising:
a resonator body comprising:
a top conductive layer;
a piezoelectric layer located below the top conductive layer; and
a device layer of a radio frequency (RF) device below the piezoelectric layer opposite the top conductive layer,
wherein a reflectance (R) of an acoustic wave at an interface between the device layer and either the piezoelectric layer or a bottom conductive layer between the device layer and the piezoelectric layer is greater than 70%.