US 12,244,117 B2
High-voltage pulse generator, gas laser apparatus, and method for manufacturing electronic device
Weihua Jiang, Nagaoka (JP); and Hiroshi Umeda, Oyama (JP)
Assigned to National University Corporation Nagaoka University of Technology, Niigata (JP); and Gigaphoton Inc., Tochigi (JP)
Filed by National University Corporation Nagaoka University of Technology, Niigata (JP); and Gigaphoton Inc., Tochigi (JP)
Filed on Aug. 9, 2021, as Appl. No. 17/397,375.
Application 17/397,375 is a continuation of application No. PCT/JP2019/012902, filed on Mar. 26, 2019.
Prior Publication US 2021/0367394 A1, Nov. 25, 2021
Int. Cl. H01S 3/097 (2006.01); H01S 3/038 (2006.01); H01S 3/0975 (2006.01)
CPC H01S 3/09702 (2013.01) [H01S 3/038 (2013.01); H01S 3/0975 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A high-voltage pulse generation device configured to apply a pulsed high voltage to a space between a pair of discharge electrodes disposed in a laser chamber of a gas laser apparatus, the high-voltage pulse generation device comprising:
n transformer cores that form a transformer, where n is a natural number greater than or equal to two;
n primary electric circuits of the transformer, the n primary electric circuits each having a first terminal connected to a reference potential and a second terminal connected to a charger, the n primary electric circuits each including one or more primary coils, one or more diodes connected in parallel to the one or more primary coils, and one or more pulse generators connected in parallel to the one or more primary coils; and
a secondary electric circuit of the transformer, the secondary electric circuit including a secondary coil and connected to the pair of discharge electrodes, wherein
each of the one or more pulse generators has a third terminal and outputs a pulsed current through the third terminal, and
the reference potential is a ground potential and connected to a cathode of each of the one or more diodes and to the third terminal.