US 12,244,116 B2
Apparatus for and method of optical component alignment
Hong Ye, San Diego, CA (US)
Assigned to Cymer, LLC, San Diego, CA (US)
Filed by Cymer, LLC, San Diego, CA (US)
Filed on Sep. 20, 2023, as Appl. No. 18/370,488.
Application 18/370,488 is a continuation of application No. 18/020,718, granted, now 11,799,261, previously published as PCT/US2021/045324, filed on Aug. 10, 2021.
Claims priority of provisional application 63/072,390, filed on Aug. 31, 2020.
Prior Publication US 2024/0014621 A1, Jan. 11, 2024
Int. Cl. H01S 3/00 (2006.01); G02B 5/20 (2006.01); G03F 7/00 (2006.01)
CPC H01S 3/0057 (2013.01) [G02B 5/208 (2013.01); G03F 7/70141 (2013.01); G03F 7/7055 (2013.01)] 14 Claims
OG exemplary drawing
 
1. An optical pulse stretcher comprising:
a sealed enclosure, the sealed enclosure including a window transparent to visible light;
a first optical feature having a first region positioned within the enclosure;
a second optical feature having a second region positioned within the enclosure; and
an image integration module arranged to receive first region light from the first optical feature and second region light from the second optical feature and adapted to cause the first optical feature light to propagate parallel to the second optical feature light through the window, wherein the image integration module comprises a planar mirrored surface inclined with respect to a line passing through a center of the planar mirrored surface and substantially parallel to the first region feature by an angle θ wherein the angle θ is selected to maximize a field of view of the image integration module.