US 12,244,115 B2
Laser device with safety interlock and scientific instrument for use with the same
Francis Deck, Hillsboro, OR (US); and Justin Morrow, Hillsboro, OR (US)
Assigned to FEI COMPANY, Hillsboro, OR (US)
Filed by FEI COMPANY, Hillsboro, OR (US)
Filed on Dec. 16, 2022, as Appl. No. 18/083,228.
Prior Publication US 2024/0204470 A1, Jun. 20, 2024
Int. Cl. G01J 3/44 (2006.01); G01J 3/02 (2006.01); H01S 3/00 (2006.01)
CPC H01S 3/0014 (2013.01) [G01J 3/0205 (2013.01); G01J 3/0218 (2013.01); G01J 3/027 (2013.01); G01J 3/44 (2013.01); H01S 3/005 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A laser device for use with a scientific instrument, the laser device comprising:
a laser emitter configured to generate a laser beam for radiating a sample disposed in a vacuum chamber of the scientific instrument; and
a control system configured to receive a pressure signal associated with the vacuum chamber from a pressure sensor, and to change a state of the laser beam in response to the pressure reaching a threshold level,
wherein the scientific instrument is a charged particle microscope.