US 12,243,948 B2
Microstructure enhanced absorption photosensitive devices
Shih-Yuan Wang, Palo Alto, CA (US); and Shih-Ping Wang, Los Altos, CA (US)
Assigned to W&W Sens Devices, Inc., Los Altos, CA (US)
Filed by W&W Sens Devices, Inc., Los Altos, CA (US)
Filed on Sep. 3, 2024, as Appl. No. 18/822,880.
Application 18/822,880 is a division of application No. 18/385,213, filed on Oct. 30, 2023, granted, now 12,087,871.
Application 17/974,325 is a division of application No. 17/707,429, filed on Mar. 29, 2022, granted, now 11,621,360, issued on Apr. 4, 2023.
Application 17/182,954 is a division of application No. 16/528,958, filed on Aug. 1, 2019, granted, now 11,121,271, issued on Sep. 14, 2021.
Application 17/182,954 is a division of application No. 15/979,821, filed on May 15, 2018, granted, now 10,624,300.
Application 17/707,429 is a division of application No. 17/532,831, filed on Nov. 22, 2021, granted, now 11,309,444, issued on Apr. 19, 2022.
Application 18/385,213 is a continuation in part of application No. 17/974,325, filed on Oct. 26, 2022, granted, now 11,830,954, issued on Nov. 28, 2023.
Application 18/385,213 is a continuation in part of application No. 18/113,474, filed on Feb. 23, 2023.
Application 17/707,429 is a continuation in part of application No. 17/182,954, filed on Feb. 23, 2021, granted, now 11,791,432, issued on Oct. 17, 2023.
Application 17/532,831 is a continuation in part of application No. 17/182,954, filed on Feb. 23, 2021, granted, now 11,791,432, issued on Oct. 17, 2023.
Application 16/528,958 is a continuation in part of application No. 14/947,718, filed on Nov. 20, 2015, granted, now 10,622,498, issued on Mar. 25, 2020.
Application 16/528,958 is a continuation in part of application No. PCT/US2016/067977, filed on Dec. 21, 2016.
Application 16/528,958 is a continuation in part of application No. 16/042,535, filed on Jul. 23, 2018, granted, now 10,700,225, issued on Jun. 30, 2020.
Application 16/528,958 is a continuation in part of application No. 16/296,985, filed on Mar. 8, 2019, granted, now 10,468,543, issued on Oct. 16, 2019.
Application 16/528,958 is a continuation in part of application No. PCT/US2018/043289, filed on Jul. 23, 2018.
Application 16/528,958 is a continuation in part of application No. PCT/US2018/057963, filed on Oct. 29, 2018.
Application 15/979,821 is a continuation in part of application No. 14/947,718, filed on Nov. 20, 2015, granted, now 10,622,498, issued on Mar. 25, 2020.
Application 15/979,821 is a continuation in part of application No. 15/309,922, granted, now 9,818,893, issued on Oct. 25, 2017, previously published as PCT/US2015/061120, filed on Nov. 17, 2015.
Application 15/979,821 is a continuation in part of application No. PCT/US2016/067977, filed on Dec. 21, 2016.
Application 16/528,958 is a continuation of application No. 15/797,821, filed on Oct. 30, 2017, granted, now 10,446,700, issued on Oct. 15, 2019.
Application 16/042,535 is a continuation in part of application No. 15/797,821, filed on Oct. 30, 2017, granted, now 10,446,700.
Application 15/309,922 is a continuation of application No. 14/943,898, filed on Nov. 17, 2015, granted, now 9,530,905.
Application 15/309,922 is a continuation of application No. 14/945,033, filed on Nov. 18, 2015, granted, now 9,525,084.
Application 14/947,718 is a continuation of application No. PCT/US2014/039208, filed on May 22, 2014.
Claims priority of provisional application 61/826,446, filed on May 22, 2013.
Claims priority of provisional application 61/843,021, filed on Jul. 4, 2013.
Claims priority of provisional application 61/905,109, filed on Nov. 15, 2013.
Claims priority of provisional application 62/874,418, filed on Jul. 15, 2019.
Claims priority of provisional application 62/873,891, filed on Jul. 13, 2019.
Claims priority of provisional application 62/870,533, filed on Jul. 3, 2019.
Claims priority of provisional application 62/868,911, filed on Jun. 29, 2019.
Claims priority of provisional application 62/867,186, filed on Jun. 26, 2019.
Claims priority of provisional application 62/863,852, filed on Jun. 19, 2019.
Claims priority of provisional application 62/863,231, filed on Jun. 18, 2019.
Claims priority of provisional application 62/860,115, filed on Jun. 11, 2019.
Claims priority of provisional application 62/853,280, filed on May 28, 2019.
Claims priority of provisional application 62/846,554, filed on May 10, 2019.
Claims priority of provisional application 62/843,206, filed on May 3, 2019.
Claims priority of provisional application 62/841,798, filed on May 1, 2019.
Claims priority of provisional application 62/828,976, filed on Apr. 3, 2019.
Claims priority of provisional application 62/820,695, filed on Mar. 19, 2019.
Claims priority of provisional application 62/819,604, filed on Mar. 17, 2019.
Claims priority of provisional application 62/819,669, filed on Mar. 17, 2019.
Claims priority of provisional application 62/808,949, filed on Feb. 22, 2019.
Claims priority of provisional application 62/805,850, filed on Feb. 14, 2019.
Claims priority of provisional application 62/802,718, filed on Feb. 8, 2019.
Claims priority of provisional application 62/802,171, filed on Feb. 6, 2019.
Claims priority of provisional application 62/800,371, filed on Feb. 1, 2019.
Claims priority of provisional application 62/797,263, filed on Jan. 26, 2019.
Claims priority of provisional application 62/797,141, filed on Jan. 25, 2019.
Claims priority of provisional application 62/794,330, filed on Jan. 18, 2019.
Claims priority of provisional application 62/784,342, filed on Dec. 21, 2018.
Claims priority of provisional application 62/779,693, filed on Dec. 14, 2018.
Claims priority of provisional application 62/777,157, filed on Dec. 9, 2018.
Claims priority of provisional application 62/772,498, filed on Nov. 28, 2018.
Claims priority of provisional application 62/770,656, filed on Nov. 21, 2018.
Claims priority of provisional application 62/750,016, filed on Oct. 24, 2018.
Claims priority of provisional application 62/737,062, filed on Sep. 26, 2018.
Claims priority of provisional application 62/733,476, filed on Sep. 19, 2018.
Claims priority of provisional application 62/724,449, filed on Aug. 29, 2018.
Claims priority of provisional application 62/719,689, filed on Aug. 19, 2018.
Claims priority of provisional application 62/717,750, filed on Aug. 10, 2018.
Claims priority of provisional application 62/716,310, filed on Aug. 8, 2018.
Claims priority of provisional application 62/713,455, filed on Aug. 1, 2018.
Claims priority of provisional application 62/682,909, filed on Jun. 9, 2018.
Claims priority of provisional application 62/677,609, filed on May 29, 2018.
Claims priority of provisional application 62/675,130, filed on May 22, 2018.
Claims priority of provisional application 62/666,005, filed on May 2, 2018.
Claims priority of provisional application 62/662,217, filed on Apr. 24, 2018.
Claims priority of provisional application 62/659,072, filed on Apr. 17, 2018.
Claims priority of provisional application 62/659,067, filed on Apr. 17, 2018.
Claims priority of provisional application 62/652,830, filed on Apr. 4, 2018.
Claims priority of provisional application 62/651,087, filed on Mar. 31, 2018.
Claims priority of provisional application 62/651,053, filed on Mar. 30, 2018.
Claims priority of provisional application 62/646,871, filed on Mar. 22, 2018.
Claims priority of provisional application 62/645,810, filed on Mar. 21, 2018.
Claims priority of provisional application 62/640,522, filed on Mar. 8, 2018.
Claims priority of provisional application 62/639,920, filed on Mar. 7, 2018.
Claims priority of provisional application 62/639,472, filed on Mar. 6, 2018.
Claims priority of provisional application 62/639,356, filed on Mar. 6, 2018.
Claims priority of provisional application 62/637,645, filed on Mar. 2, 2018.
Claims priority of provisional application 62/634,692, filed on Feb. 13, 2018.
Claims priority of provisional application 62/633,514, filed on Feb. 21, 2018.
Claims priority of provisional application 62/631,630, filed on Feb. 17, 2018.
Claims priority of provisional application 62/628,764, filed on Feb. 9, 2018.
Claims priority of provisional application 62/623,971, filed on Jan. 30, 2018.
Claims priority of provisional application 62/615,314, filed on Jan. 9, 2018.
Claims priority of provisional application 62/607,860, filed on Dec. 19, 2017.
Claims priority of provisional application 62/599,246, filed on Dec. 15, 2017.
Claims priority of provisional application 62/591,072, filed on Nov. 27, 2017.
Claims priority of provisional application 62/561,869, filed on Sep. 22, 2017.
Claims priority of provisional application 62/556,426, filed on Sep. 10, 2017.
Claims priority of provisional application 62/553,844, filed on Sep. 2, 2017.
Claims priority of provisional application 62/547,728, filed on Aug. 18, 2017.
Claims priority of provisional application 62/542,243, filed on Aug. 7, 2017.
Claims priority of provisional application 62/540,524, filed on Aug. 2, 2017.
Claims priority of provisional application 62/535,801, filed on Jul. 21, 2017.
Claims priority of provisional application 62/533,603, filed on Jul. 17, 2017.
Claims priority of provisional application 62/533,078, filed on Jul. 16, 2017.
Claims priority of provisional application 62/530,281, filed on Jul. 9, 2017.
Claims priority of provisional application 62/527,962, filed on Jun. 30, 2017.
Claims priority of provisional application 62/522,169, filed on Jun. 20, 2017.
Claims priority of provisional application 62/521,504, filed on Jun. 18, 2017.
Claims priority of provisional application 62/514,889, filed on Jun. 6, 2017.
Claims priority of provisional application 62/510,249, filed on May 23, 2017.
Claims priority of provisional application 62/509,093, filed on May 20, 2017.
Claims priority of provisional application 62/505,974, filed on May 14, 2017.
Claims priority of provisional application 62/500,581, filed on May 3, 2017.
Claims priority of provisional application 62/488,998, filed on Apr. 24, 2017.
Claims priority of provisional application 62/487,606, filed on Apr. 20, 2017.
Claims priority of provisional application 62/484,474, filed on Apr. 12, 2017.
Claims priority of provisional application 62/474,179, filed on Mar. 21, 2017.
Claims priority of provisional application 62/465,734, filed on Mar. 1, 2017.
Claims priority of provisional application 62/232,716, filed on Sep. 25, 2015.
Claims priority of provisional application 62/213,556, filed on Sep. 2, 2015.
Claims priority of provisional application 62/213,558, filed on Sep. 2, 2015.
Claims priority of provisional application 62/209,311, filed on Aug. 24, 2015.
Claims priority of provisional application 62/205,717, filed on Aug. 15, 2015.
Claims priority of provisional application 62/199,607, filed on Jul. 31, 2015.
Claims priority of provisional application 62/197,120, filed on Jul. 27, 2015.
Claims priority of provisional application 62/188,876, filed on Jul. 6, 2015.
Claims priority of provisional application 62/182,602, filed on Jun. 21, 2015.
Claims priority of provisional application 62/175,855, filed on Jun. 15, 2015.
Claims priority of provisional application 62/174,498, filed on Jun. 11, 2015.
Claims priority of provisional application 62/171,915, filed on Jun. 5, 2015.
Claims priority of provisional application 62/157,876, filed on May 6, 2015.
Claims priority of provisional application 62/154,675, filed on Apr. 29, 2015.
Claims priority of provisional application 62/153,443, filed on Apr. 27, 2015.
Claims priority of provisional application 62/139,511, filed on Mar. 27, 2015.
Claims priority of provisional application 62/111,582, filed on Feb. 3, 2015.
Claims priority of provisional application 62/100,025, filed on Jan. 5, 2015.
Claims priority of provisional application 62/090,879, filed on Dec. 11, 2014.
Claims priority of provisional application 62/081,583, filed on Nov. 19, 2014.
Claims priority of provisional application 62/081,538, filed on Nov. 18, 2014.
Claims priority of provisional application 61/834,873, filed on Jun. 13, 2013.
Prior Publication US 2024/0429332 A1, Dec. 26, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 31/0232 (2014.01); G02B 6/122 (2006.01); G02B 6/136 (2006.01); H01L 23/66 (2006.01); H01L 31/02 (2006.01); H01L 31/0224 (2006.01); H01L 31/0236 (2006.01); H01L 31/024 (2014.01); H01L 31/028 (2006.01); H01L 31/0304 (2006.01); H01L 31/0312 (2006.01); H01L 31/0352 (2006.01); H01L 31/036 (2006.01); H01L 31/054 (2014.01); H01L 31/0745 (2012.01); H01L 31/075 (2012.01); H01L 31/077 (2012.01); H01L 31/105 (2006.01); H01L 31/107 (2006.01); H01L 31/18 (2006.01); G02B 6/12 (2006.01)
CPC H01L 31/035272 (2013.01) [G02B 6/122 (2013.01); G02B 6/136 (2013.01); H01L 23/66 (2013.01); H01L 31/02005 (2013.01); H01L 31/02016 (2013.01); H01L 31/02019 (2013.01); H01L 31/022408 (2013.01); H01L 31/022475 (2013.01); H01L 31/02327 (2013.01); H01L 31/02363 (2013.01); H01L 31/024 (2013.01); H01L 31/028 (2013.01); H01L 31/0284 (2013.01); H01L 31/0304 (2013.01); H01L 31/03046 (2013.01); H01L 31/0312 (2013.01); H01L 31/035209 (2013.01); H01L 31/035227 (2013.01); H01L 31/035281 (2013.01); H01L 31/036 (2013.01); H01L 31/054 (2014.12); H01L 31/0745 (2013.01); H01L 31/075 (2013.01); H01L 31/077 (2013.01); H01L 31/105 (2013.01); H01L 31/1055 (2013.01); H01L 31/107 (2013.01); H01L 31/1075 (2013.01); H01L 31/1804 (2013.01); H01L 31/1808 (2013.01); H01L 31/1812 (2013.01); H01L 31/184 (2013.01); H01L 31/1844 (2013.01); G02B 2006/12097 (2013.01); G02B 2006/12176 (2013.01); H01L 2223/6627 (2013.01); Y02E 10/52 (2013.01); Y02E 10/548 (2013.01)] 16 Claims
OG exemplary drawing
 
1. An integrated structure comprising:
an array of pillars comprising Si, Ge, and/or SiGe alloy semiconductor material, wherein at least some of the pillars are configured to include photodetectors and have respective light-receiving surfaces and respective sides;
wherein at least some of the pillars comprise P-doped and N-doped regions and are configured to respond to illumination with light in selected visible and infrared wavelengths by generating electrical charge carriers;
one or more holes that are fabricated as recesses at or under the light-receiving surface of each of at least some of the pillars, have elongated or other shapes at or parallel to the light-receiving surfaces, extend into the pillars to a depth of 100 to 10000 nm, and are filled at least partly with solid dielectric material;
wherein at least some of the holes are elongated along the respective light-receiving surfaces;
side-isolation comprising solid material between at least portions of the sides of at least some of the pillars;
a solid dielectric material forming a base dielectric region for the array;
electrical contacts configured to provide electrical pathways coupled electrically to at least some of the photodetectors, including for selected reverse-biasing thereof;
wherein the presence of said one or more holes increases by a factor of at least 1.1 the absorption of the light by at least some of the photodetectors relative to like photodetectors lacking said holes.