US 12,243,901 B2
High-speed light sensing apparatus III
Yun-Chung Na, San Jose, CA (US); Che-Fu Liang, Zhubei (TW); Shu-Lu Chen, Zhubei (TW); Szu-Lin Cheng, Zhubei (TW); Han-Din Liu, Sunnyvale, CA (US); Chien-Lung Chen, Taoyuan (TW); Yuan-Fu Lyu, Taoyuan (TW); Chieh-Ting Lin, Zhubei (TW); Bo-Jiun Chen, Zhubei (TW); Hui-Wen Chen, Zhubei (TW); Shu-Wei Chu, Zhubei (TW); Chung-Chih Lin, Zhubei (TW); and Kuan-Chen Chu, Zhubei (TW)
Assigned to Artilux, Inc., Menlo Park, CA (US)
Filed by Artilux, Inc., Menlo Park, CA (US)
Filed on Mar. 15, 2023, as Appl. No. 18/121,970.
Application 18/121,970 is a continuation of application No. 16/521,974, filed on Jul. 25, 2019, granted, now 11,637,142.
Application 16/521,974 is a continuation of application No. 15/944,658, filed on Apr. 3, 2018, granted, now 10,418,407, issued on Sep. 17, 2019.
Application 15/944,658 is a continuation in part of application No. 15/908,447, filed on Feb. 28, 2018, granted, now 10,886,309, issued on Jan. 5, 2021.
Application 15/908,447 is a continuation in part of application No. 15/338,660, filed on Oct. 31, 2016, granted, now 10,254,389, issued on Apr. 9, 2019.
Claims priority of provisional application 62/617,317, filed on Jan. 15, 2018.
Claims priority of provisional application 62/613,054, filed on Jan. 3, 2018.
Claims priority of provisional application 62/596,914, filed on Dec. 11, 2017.
Claims priority of provisional application 62/581,777, filed on Nov. 5, 2017.
Claims priority of provisional application 62/581,720, filed on Nov. 5, 2017.
Claims priority of provisional application 62/561,266, filed on Sep. 21, 2017.
Claims priority of provisional application 62/561,256, filed on Sep. 21, 2017.
Claims priority of provisional application 62/542,329, filed on Aug. 8, 2017.
Claims priority of provisional application 62/534,179, filed on Jul. 18, 2017.
Claims priority of provisional application 62/511,977, filed on May 27, 2017.
Claims priority of provisional application 62/504,531, filed on May 10, 2017.
Claims priority of provisional application 62/485,003, filed on Apr. 13, 2017.
Claims priority of provisional application 62/481,131, filed on Apr. 4, 2017.
Claims priority of provisional application 62/479,322, filed on Mar. 31, 2017.
Claims priority of provisional application 62/465,139, filed on Feb. 28, 2017.
Claims priority of provisional application 62/294,436, filed on Feb. 12, 2016.
Claims priority of provisional application 62/271,386, filed on Dec. 28, 2015.
Claims priority of provisional application 62/251,691, filed on Nov. 6, 2015.
Prior Publication US 2023/0215902 A1, Jul. 6, 2023
Int. Cl. G01S 7/4863 (2020.01); G01S 7/481 (2006.01); G01S 7/4914 (2020.01); G01S 17/36 (2006.01); H01L 27/146 (2006.01); H01L 29/161 (2006.01); H01L 31/103 (2006.01)
CPC H01L 27/14643 (2013.01) [G01S 7/4816 (2013.01); G01S 7/4863 (2013.01); G01S 7/4914 (2013.01); G01S 17/36 (2013.01); H01L 27/14609 (2013.01); H01L 27/14612 (2013.01); H01L 27/14629 (2013.01); H01L 27/14634 (2013.01); H01L 27/14681 (2013.01); H01L 29/161 (2013.01); H01L 31/1037 (2013.01); H01L 27/14627 (2013.01); H01L 27/1463 (2013.01); H01L 27/14636 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A photodetection device comprising:
a first substrate comprising:
one or more first capacitors; and
a photodetector pixel comprising:
an absorption region configured to receive light and generate photo-carriers, and
one or more readout terminals configured to collect a portion of the photo-carriers; and
a second substrate bonded to the first substrate, the second substrate comprising:
one or more second capacitors; and
pixel transistors configured to collect photo-carriers from the one or more readout terminals, wherein the pixel transistors comprise:
one or more readout transistors electrically coupled to the one or more readout terminals of the first substrate,
wherein the one or more readout transistors are electrically coupled to the one or more first capacitors of the first substrate and the one or more second capacitors of the second substrate.