| CPC H01L 23/49844 (2013.01) [H01L 21/485 (2013.01); H01L 25/072 (2013.01); H01L 24/48 (2013.01); H01L 2224/48225 (2013.01)] | 18 Claims |

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1. A method of improving a current balance of parallel chips in a power module including plural power semiconductor chips connected to gate lines and source lines extending from gate pins and source pins in parallel by different distances, the method comprising:
forming a current area of each of a gate line and a source line connected to power semiconductor chips other than a first power semiconductor chip closest to the gate pin and the source pin larger than a current area of each of a gate line and a source line connected to the first power semiconductor chip in the power module.
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